Observations of fixed and mobile charge in composite mems resonators

Keyphrases

• Fixed Charge 100%
• MEMS Resonator 100%
• Mobile Charge 100%
• Resonator 50%
• Oxides 50%
• Dielectric 50%
• Non-contact 50%
• Oxide Layer 50%
• Resonant Frequency 50%
• Bias Voltage 50%
• Composite Beam 50%
• Sensor-actuators 50%
• Inertial Sensors 50%
• Dielectric Charge 50%
• Optical Actuators 50%
• Electrostatic Resonators 50%
• Timing Reference 50%
• Coated Composites 50%

Engineering

• Resonator 100%
• Dielectrics 66%
• Microelectromechanical System 33%
• Bias Voltage 33%
• Oxide Layer 33%
• Composite Beam 33%
• Inertial Sensor 33%
• Actuator 33%
• Resonant Frequency 33%