@inproceedings{a15292377a04498b98581e472e2d719d,
title = "Observations of fixed and mobile charge in composite mems resonators",
abstract = "This paper investigates dielectric charge in oxide-coated composite-beam silicon electrostatic resonators. The effects of charge in the oxide layers on resonant frequency are theoretically modeled. Evidence for the presence of both fixed and mobile charge is presented through experimental studies. It is shown that the motion of charge is controllable through the bias voltage applied to the resonator. These studies are relevant for improving the reliability of non-contacting MEMS where dielectrics may be present such as timing references, inertial sensors, and optical actuators.",
author = "G. Bahl and R. Melamud and B. Kim and S. Chandorkar and J. Salvia and Hopcroft, {M. A.} and Hennessy, {R. G.} and S. Yoneoka and Jha, {C. M.} and G. Yama and D. Elata and Candler, {R. N.} and Howe, {R. T.} and Kenny, {T. W.}",
note = "This work was supported by DARPA CIEMS, Bosch, Epson, HP, Agilent, Boeing, Qualcomm, DARPA HERMIT (ONR N66001-03-1-8942), and the National Nanofabrication Users Network facilities funded by the National Science Foundation under award ECS-9731294, and the National Science Foundation Instrumentation for Materials Research Program (DMR 9504099), and the Stanford Graduate Fellowship support for R. Melamud. We thank Andrew Graham, Wes Smith and Scott Lord for their support.; 2008 Solid-State Sensors, Actuators, and Microsystems Workshop ; Conference date: 01-06-2008 Through 05-06-2008",
year = "2008",
doi = "10.31438/trf.hh2008.29",
language = "English (US)",
series = "Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop",
publisher = "Transducer Research Foundation",
pages = "102--105",
editor = "Turner, {Kimberly L.} and Leland Spangler",
booktitle = "2008 Solid-State Sensors, Actuators, and Microsystems Workshop",
}