Observations of fixed and mobile charge in composite mems resonators

G. Bahl; R. Melamud; B. Kim; S. Chandorkar; J. Salvia; M. A. Hopcroft; R. G. Hennessy; S. Yoneoka; C. M. Jha; G. Yama; D. Elata; R. N. Candler; R. T. Howe; T. W. Kenny

doi:10.31438/trf.hh2008.29

Observations of fixed and mobile charge in composite mems resonators

G. Bahl, R. Melamud, B. Kim, S. Chandorkar, J. Salvia, M. A. Hopcroft, R. G. Hennessy, S. Yoneoka, C. M. Jha, G. Yama, D. Elata, R. N. Candler, R. T. Howe, T. W. Kenny

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper investigates dielectric charge in oxide-coated composite-beam silicon electrostatic resonators. The effects of charge in the oxide layers on resonant frequency are theoretically modeled. Evidence for the presence of both fixed and mobile charge is presented through experimental studies. It is shown that the motion of charge is controllable through the bias voltage applied to the resonator. These studies are relevant for improving the reliability of non-contacting MEMS where dielectrics may be present such as timing references, inertial sensors, and optical actuators.

Original language	English (US)
Title of host publication	2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Editors	Kimberly L. Turner, Leland Spangler
Publisher	Transducer Research Foundation
Pages	102-105
Number of pages	4
ISBN (Electronic)	0964002477, 9780964002470
DOIs	https://doi.org/10.31438/trf.hh2008.29
State	Published - 2008
Externally published	Yes
Event	2008 Solid-State Sensors, Actuators, and Microsystems Workshop - Hilton Head Island, United States Duration: Jun 1 2008 → Jun 5 2008

Publication series

Name	Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference	2008 Solid-State Sensors, Actuators, and Microsystems Workshop
Country/Territory	United States
City	Hilton Head Island
Period	6/1/08 → 6/5/08

ASJC Scopus subject areas

Control and Systems Engineering
Electrical and Electronic Engineering
Hardware and Architecture

Online availability

10.31438/trf.hh2008.29

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Bahl, G., Melamud, R., Kim, B., Chandorkar, S., Salvia, J., Hopcroft, M. A., Hennessy, R. G., Yoneoka, S., Jha, C. M., Yama, G., Elata, D., Candler, R. N., Howe, R. T., & Kenny, T. W. (2008). Observations of fixed and mobile charge in composite mems resonators. In K. L. Turner, & L. Spangler (Eds.), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop (pp. 102-105). (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). Transducer Research Foundation. https://doi.org/10.31438/trf.hh2008.29

Observations of fixed and mobile charge in composite mems resonators. / Bahl, G.; Melamud, R.; Kim, B. et al.
2008 Solid-State Sensors, Actuators, and Microsystems Workshop. ed. / Kimberly L. Turner; Leland Spangler. Transducer Research Foundation, 2008. p. 102-105 (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Bahl, G, Melamud, R, Kim, B, Chandorkar, S, Salvia, J, Hopcroft, MA, Hennessy, RG, Yoneoka, S, Jha, CM, Yama, G, Elata, D, Candler, RN, Howe, RT & Kenny, TW 2008, Observations of fixed and mobile charge in composite mems resonators. in KL Turner & L Spangler (eds), 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop, Transducer Research Foundation, pp. 102-105, 2008 Solid-State Sensors, Actuators, and Microsystems Workshop, Hilton Head Island, United States, 6/1/08. https://doi.org/10.31438/trf.hh2008.29

Bahl G, Melamud R, Kim B, Chandorkar S, Salvia J, Hopcroft MA et al. Observations of fixed and mobile charge in composite mems resonators. In Turner KL, Spangler L, editors, 2008 Solid-State Sensors, Actuators, and Microsystems Workshop. Transducer Research Foundation. 2008. p. 102-105. (Technical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop). doi: 10.31438/trf.hh2008.29

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abstract = "This paper investigates dielectric charge in oxide-coated composite-beam silicon electrostatic resonators. The effects of charge in the oxide layers on resonant frequency are theoretically modeled. Evidence for the presence of both fixed and mobile charge is presented through experimental studies. It is shown that the motion of charge is controllable through the bias voltage applied to the resonator. These studies are relevant for improving the reliability of non-contacting MEMS where dielectrics may be present such as timing references, inertial sensors, and optical actuators.",

author = "G. Bahl and R. Melamud and B. Kim and S. Chandorkar and J. Salvia and Hopcroft, {M. A.} and Hennessy, {R. G.} and S. Yoneoka and Jha, {C. M.} and G. Yama and D. Elata and Candler, {R. N.} and Howe, {R. T.} and Kenny, {T. W.}",

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AU - Bahl, G.

AU - Melamud, R.

AU - Kim, B.

AU - Chandorkar, S.

AU - Salvia, J.

AU - Hopcroft, M. A.

AU - Hennessy, R. G.

AU - Yoneoka, S.

AU - Jha, C. M.

AU - Yama, G.

AU - Elata, D.

AU - Candler, R. N.

AU - Howe, R. T.

AU - Kenny, T. W.

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AB - This paper investigates dielectric charge in oxide-coated composite-beam silicon electrostatic resonators. The effects of charge in the oxide layers on resonant frequency are theoretically modeled. Evidence for the presence of both fixed and mobile charge is presented through experimental studies. It is shown that the motion of charge is controllable through the bias voltage applied to the resonator. These studies are relevant for improving the reliability of non-contacting MEMS where dielectrics may be present such as timing references, inertial sensors, and optical actuators.

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BT - 2008 Solid-State Sensors, Actuators, and Microsystems Workshop

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Observations of fixed and mobile charge in composite mems resonators

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