Observation of point defect in silicon using HRTEM

Sung Il Baik, Hee Suk Chung, Jian Min Zuo, Young Woon Kim

Research output: Contribution to journalArticle

Original languageEnglish (US)
Pages (from-to)994-995
Number of pages2
JournalMicroscopy and Microanalysis
Issue numberSUPPL. 2
StatePublished - Sep 24 2004

ASJC Scopus subject areas

  • Instrumentation

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