Numerical modeling of axisymmetric and three-dimensional flows in MEMS nozzles

Keyphrases

• Nozzle 100%
• Numerical Modeling 100%
• Three-dimensional Flow 100%
• Micronozzle 66%
• Low Reynolds number 33%
• Silicon Wafer 33%
• Continuum Approach 33%
• Performance-based 33%
• Viscous Effects 33%
• Kinetic Approach 33%
• Design Errors 33%
• Three-dimensional Effect 33%
• Gas Expansion 33%
• Conical Nozzle 33%
• Two-dimensional Modeling 33%
• Thrust Loss 33%

Engineering

• Microelectromechanical System 100%
• Axisymmetric 100%
• Numerical Modeling 100%
• Dimensional Flow 100%
• Two Dimensional 33%
• Silicon Wafer 33%
• Numerical Study 33%
• Dimensional Modeling 33%