Normally-closed electrostatic microvalve fabricated using exclusively soft-lithographic techniques and operated with portable electronics

Joshua D. Tice, John B. Rosheck, Christopher D. Hamlin, Christopher A. Apblett, Paul J.A. Kenis

Research output: Contribution to journalArticle

Abstract

We report an elastomer-based electrostatic microvalve that was fabricated using replica molding, micro-transfer printing, and plasma bonding. The microvalve can be actuated with an electric potential of ∼220 V and can withstand pressures up to 3 kPa. Sixteen independentlyoperated valves were integrated on a single chip and operated with portable electronics. [2013-0101].

Original languageEnglish (US)
Pages (from-to)1251-1253
Number of pages3
JournalJournal of Microelectromechanical Systems
Volume22
Issue number6
DOIs
StatePublished - Dec 1 2013

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Keywords

  • Carbon nanotubes
  • Electrostatic microvalve
  • Poly (dimethylsiloxane)
  • Soft-lithography

ASJC Scopus subject areas

  • Electrical and Electronic Engineering
  • Mechanical Engineering

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