Abstract
Product quality variables for many electronics and materials processes are set at the nanoscale and smaller length scales. Although the control of these processes is of scientific and industrial interest, there is a shortage of feedback controller design methods based on the noncontinuum models that describe such nanoscopic phenomena. In this study, linear, gain-scheduled, and nonlinear feedback controllers are designed for a coupled kinetic Monte Carlo-finite difference code that simulates the manufacture of copper interconnects. The feedback controller designs incorporate a low order stochastic model constructed from the coupled continuum-noncontinuum code.
Original language | English (US) |
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Pages (from-to) | 541-546 |
Number of pages | 6 |
Journal | IFAC Proceedings Volumes (IFAC-PapersOnline) |
Volume | 37 |
Issue number | 1 |
State | Published - 2004 |
Event | 7th International Symposium on Advanced Control of Chemical Processes, ADCHEM 2003 - , Hong Kong Duration: Jan 11 2004 → Jan 14 2004 |
Keywords
- Gain-scheduled control
- Kinetic Monte Carlo simulation
- Markov processes
- Noncontinuum models
- Nonlinear control
- Stochastic control
- Stochastic simulation
ASJC Scopus subject areas
- Control and Systems Engineering