Nonlinear feedback control of a coupled kinetic Monte carlo-finite difference code

Effendi Rusli, Timothy O. Drews, David L. Ma, Richard C. Alkire, Richard D. Braatz

Research output: Contribution to journalConference articlepeer-review


Product quality variables for many electronics and materials processes are set at the nanoscale and smaller length scales. Although the control of these processes is of scientific and industrial interest, there is a shortage of feedback controller design methods based on the noncontinuum models that describe such nanoscopic phenomena. In this study, linear, gain-scheduled, and nonlinear feedback controllers are designed for a coupled kinetic Monte Carlo-finite difference code that simulates the manufacture of copper interconnects. The feedback controller designs incorporate a low order stochastic model constructed from the coupled continuum-noncontinuum code.

Original languageEnglish (US)
Pages (from-to)541-546
Number of pages6
JournalIFAC Proceedings Volumes (IFAC-PapersOnline)
Issue number1
StatePublished - 2004
Event7th International Symposium on Advanced Control of Chemical Processes, ADCHEM 2003 - , Hong Kong
Duration: Jan 11 2004Jan 14 2004


  • Gain-scheduled control
  • Kinetic Monte Carlo simulation
  • Markov processes
  • Noncontinuum models
  • Nonlinear control
  • Stochastic control
  • Stochastic simulation

ASJC Scopus subject areas

  • Control and Systems Engineering


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