TY - GEN
T1 - Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation
AU - Sulfridge, Marc
AU - Saif, Taher
AU - Miller, Norman
PY - 2002
Y1 - 2002
N2 - In (Sulfridge, et al., 2001) we presented an actuation scheme for toggling a bistable MEMS from one stable state to the other using the radiation pressure of light. The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses reliably toggled the beam every time, short duration pulses only seemed to toggle the beam about half of the time. This paper presents a new, nonlinear dynamic analysis of the bistable beam device used in those experiments that explains this anomalous behavior.
AB - In (Sulfridge, et al., 2001) we presented an actuation scheme for toggling a bistable MEMS from one stable state to the other using the radiation pressure of light. The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses reliably toggled the beam every time, short duration pulses only seemed to toggle the beam about half of the time. This paper presents a new, nonlinear dynamic analysis of the bistable beam device used in those experiments that explains this anomalous behavior.
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U2 - 10.1115/IMECE2002-33260
DO - 10.1115/IMECE2002-33260
M3 - Conference contribution
AN - SCOPUS:78249240640
SN - 0791836428
SN - 9780791836422
T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings
SP - 117
EP - 120
BT - Microelectromechanical Systems
PB - American Society of Mechanical Engineers (ASME)
ER -