Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation

Marc Sulfridge, Taher Saif, Norman Miller

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In (Sulfridge, et al., 2001) we presented an actuation scheme for toggling a bistable MEMS from one stable state to the other using the radiation pressure of light. The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses reliably toggled the beam every time, short duration pulses only seemed to toggle the beam about half of the time. This paper presents a new, nonlinear dynamic analysis of the bistable beam device used in those experiments that explains this anomalous behavior.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages117-120
Number of pages4
ISBN (Print)0791836428, 9780791836422
DOIs
StatePublished - Jan 1 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

ASJC Scopus subject areas

  • Mechanical Engineering

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  • Cite this

    Sulfridge, M., Saif, T., & Miller, N. (2002). Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation. In Microelectromechanical Systems (pp. 117-120). (ASME International Mechanical Engineering Congress and Exposition, Proceedings). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33260