Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation

Marc Sulfridge, Taher Saif, Norman Miller

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

In (Sulfridge, et al., 2001) we presented an actuation scheme for toggling a bistable MEMS from one stable state to the other using the radiation pressure of light. The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses reliably toggled the beam every time, short duration pulses only seemed to toggle the beam about half of the time. This paper presents a new, nonlinear dynamic analysis of the bistable beam device used in those experiments that explains this anomalous behavior.

Original languageEnglish (US)
Title of host publicationMicroelectromechanical Systems
PublisherAmerican Society of Mechanical Engineers (ASME)
Pages117-120
Number of pages4
ISBN (Print)0791836428, 9780791836422
DOIs
StatePublished - Jan 1 2002

Publication series

NameASME International Mechanical Engineering Congress and Exposition, Proceedings

Fingerprint

MEMS
Laser pulses
Radiation
Dynamic analysis
Experiments

ASJC Scopus subject areas

  • Mechanical Engineering

Cite this

Sulfridge, M., Saif, T., & Miller, N. (2002). Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation. In Microelectromechanical Systems (pp. 117-120). (ASME International Mechanical Engineering Congress and Exposition, Proceedings). American Society of Mechanical Engineers (ASME). https://doi.org/10.1115/IMECE2002-33260

Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation. / Sulfridge, Marc; Saif, Taher; Miller, Norman.

Microelectromechanical Systems. American Society of Mechanical Engineers (ASME), 2002. p. 117-120 (ASME International Mechanical Engineering Congress and Exposition, Proceedings).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Sulfridge, M, Saif, T & Miller, N 2002, Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation. in Microelectromechanical Systems. ASME International Mechanical Engineering Congress and Exposition, Proceedings, American Society of Mechanical Engineers (ASME), pp. 117-120. https://doi.org/10.1115/IMECE2002-33260
Sulfridge M, Saif T, Miller N. Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation. In Microelectromechanical Systems. American Society of Mechanical Engineers (ASME). 2002. p. 117-120. (ASME International Mechanical Engineering Congress and Exposition, Proceedings). https://doi.org/10.1115/IMECE2002-33260
Sulfridge, Marc ; Saif, Taher ; Miller, Norman. / Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation. Microelectromechanical Systems. American Society of Mechanical Engineers (ASME), 2002. pp. 117-120 (ASME International Mechanical Engineering Congress and Exposition, Proceedings).
@inproceedings{46a27c82ed354e569fffa1949b36ca07,
title = "Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation",
abstract = "In (Sulfridge, et al., 2001) we presented an actuation scheme for toggling a bistable MEMS from one stable state to the other using the radiation pressure of light. The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses reliably toggled the beam every time, short duration pulses only seemed to toggle the beam about half of the time. This paper presents a new, nonlinear dynamic analysis of the bistable beam device used in those experiments that explains this anomalous behavior.",
author = "Marc Sulfridge and Taher Saif and Norman Miller",
year = "2002",
month = "1",
day = "1",
doi = "10.1115/IMECE2002-33260",
language = "English (US)",
isbn = "0791836428",
series = "ASME International Mechanical Engineering Congress and Exposition, Proceedings",
publisher = "American Society of Mechanical Engineers (ASME)",
pages = "117--120",
booktitle = "Microelectromechanical Systems",

}

TY - GEN

T1 - Nonlinear dynamic study of a bistable MEMS beam toggled by optical actuation

AU - Sulfridge, Marc

AU - Saif, Taher

AU - Miller, Norman

PY - 2002/1/1

Y1 - 2002/1/1

N2 - In (Sulfridge, et al., 2001) we presented an actuation scheme for toggling a bistable MEMS from one stable state to the other using the radiation pressure of light. The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses reliably toggled the beam every time, short duration pulses only seemed to toggle the beam about half of the time. This paper presents a new, nonlinear dynamic analysis of the bistable beam device used in those experiments that explains this anomalous behavior.

AB - In (Sulfridge, et al., 2001) we presented an actuation scheme for toggling a bistable MEMS from one stable state to the other using the radiation pressure of light. The experiments on radiation pressure revealed some unexpected behavior of the beam when toggled by short duration laser pulses. While long duration laser pulses reliably toggled the beam every time, short duration pulses only seemed to toggle the beam about half of the time. This paper presents a new, nonlinear dynamic analysis of the bistable beam device used in those experiments that explains this anomalous behavior.

UR - http://www.scopus.com/inward/record.url?scp=78249240640&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=78249240640&partnerID=8YFLogxK

U2 - 10.1115/IMECE2002-33260

DO - 10.1115/IMECE2002-33260

M3 - Conference contribution

AN - SCOPUS:78249240640

SN - 0791836428

SN - 9780791836422

T3 - ASME International Mechanical Engineering Congress and Exposition, Proceedings

SP - 117

EP - 120

BT - Microelectromechanical Systems

PB - American Society of Mechanical Engineers (ASME)

ER -