This paper describes a purely optical technique for measuring and spatially mapping out stress and rigidity in thin membranes. Its application to a membrane of aluminum nitride that has significant spatial nonuniformities in its elastic properties demonstrates the method. The attractive features of this technique - fast, noncontacting measurement, good spatial resolution, ability to quantify in-plane anisotropy - make it potentially useful for characterizing elements of microelectromechanical structures, masks for advanced lithography systems, acoustic filters, and other devices in which the mechanical properties of membranes are important.
|Original language||English (US)|
|Number of pages||7|
|Journal||Journal of the Acoustical Society of America|
|State||Published - 2001|
ASJC Scopus subject areas
- Arts and Humanities (miscellaneous)
- Acoustics and Ultrasonics