Non-isothermal micromechanical resonators

S. A. Chandorkar, H. Mehta, M. Agarwal, M. A. Hopcroft, C. M. Jha, R. N. Candler, G. Yama, G. Bahl, B. Kim, R. Melamud, K. E. Goodson, T. W. Kenny

Research output: Chapter in Book/Report/Conference proceedingConference contribution


In this work, we study the effect of non-isothermal operation on beam-type micromechanical resonators. A double ended tuning fork (DETF) resonator was studied under a linearly varying temperature profile along the length of the beam. We present models which show that for a constant center temperature of the beams, increasing the linear temperature gradient along the DETF substantially increases the quality factor (Q), with marginal effect on frequency. We also find that it is possible to use non-isothermal operation to improve quality factor in MEMS resonator based ovenized reference oscillators.

Original languageEnglish (US)
Title of host publicationProceedings - CIS Workshops 2007, 2007 International Conference on Computational Intelligence and Security Workshops, CISW 2007
Number of pages4
StatePublished - Dec 1 2007
Externally publishedYes
Event20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007 - Kobe, Japan
Duration: Jan 21 2007Jan 25 2007

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999


Other20th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2007

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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