NLTE magneto-hydrodynamic model for an inductively coupled plasma facility

This paper discusses the modeling of non-equilibrium effects in inductively coupled plasma (ICP) facilities. The model relies on the solution of the Navier-Stokes and Maxwell equations in a one-dimensional geometry. Steady-state solutions are obtained by means of an implicit Finite Volume method. The description of non-equilibrium effects is obtained by means of a hybrid State-to-State formulation. Thermal non-equilibrium between the translational energy mode of the gas and the vibrational energy mode of molecules are accounted for by means of a multi-temperature formulation. The electronic states of atoms are treated as separate species, allowing for non-Boltzmann distributions of their populations. The results show that non-equilibrium effects become important close to the walls, due to the combined effects of Ohming heating, and chemical composition and temperature gradients.