NLTE magneto-hydrodynamic model for an inductively coupled plasma facility

Alessandro Munafò, Marco Panesi

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper discusses the modeling of non-equilibrium effects in inductively coupled plasma (ICP) facilities. The model relies on the solution of the Navier-Stokes and Maxwell equations in a one-dimensional geometry. Steady-state solutions are obtained by means of an implicit Finite Volume method. The description of non-equilibrium effects is obtained by means of a hybrid State-to-State formulation. Thermal non-equilibrium between the translational energy mode of the gas and the vibrational energy mode of molecules are accounted for by means of a multi-temperature formulation. The electronic states of atoms are treated as separate species, allowing for non-Boltzmann distributions of their populations. The results show that non-equilibrium effects become important close to the walls, due to the combined effects of Ohming heating, and chemical composition and temperature gradients.

Original languageEnglish (US)
Title of host publication53rd AIAA Aerospace Sciences Meeting
PublisherAmerican Institute of Aeronautics and Astronautics Inc, AIAA
ISBN (Print)9781624103438
DOIs
StatePublished - Jan 1 2015
Event53rd AIAA Aerospace Sciences Meeting, 2015 - Kissimmee, United States
Duration: Jan 5 2015Jan 9 2015

Publication series

Name53rd AIAA Aerospace Sciences Meeting

Other

Other53rd AIAA Aerospace Sciences Meeting, 2015
CountryUnited States
CityKissimmee
Period1/5/151/9/15

ASJC Scopus subject areas

  • Aerospace Engineering

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  • Cite this

    Munafò, A., & Panesi, M. (2015). NLTE magneto-hydrodynamic model for an inductively coupled plasma facility. In 53rd AIAA Aerospace Sciences Meeting [AIAA 2015-0978] (53rd AIAA Aerospace Sciences Meeting). American Institute of Aeronautics and Astronautics Inc, AIAA. https://doi.org/10.2514/6.2015-0978