An overview is given on the recent progress in the fabrication and characteristics of planar microdischarge devices and arrays. Performance of each device and applications of these devices are discussed in detail.
|Original language||English (US)|
|Number of pages||2|
|Journal||Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS|
|State||Published - Dec 1 2000|
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering