Near-Zero Drift and High Electromechanical Coupling Acoustic Resonators at > 3.5 GHz

Ahmed E. Hassanien, Ruochen Lu, Songbin Gong

Research output: Contribution to journalArticlepeer-review

Abstract

In this article, near-zero drift and high electromechanical coupling acoustic resonators have been designed and demonstrated. The acoustic resonator is based on Lamb acoustic waves in a bimorph composed of lithium niobate on silicon dioxide. Our approach breaks through a performance boundary in conventional Lamb-wave resonators by introducing the bimorph while operating at higher order resonant modes. This enables the resonator to achieve frequency scalability, a low-temperature coefficient of frequency, and high electromechanical coupling altogether. The electromechanical coupling and temperature coefficient of the resonator were analytically optimized for the A3 mode through adjusting the thicknesses of different materials in the bimorph. Resonators with different dimensions and stack thickness were fabricated and measured, resulting in a temperature coefficient of frequency ranging from -17.6 to -1.1 ppm/°C, high electromechanical coupling ranging from 13.4% to 18%, and quality factors up to 800 at 3.5 GHz. The achieved specifications are adequate for fifth-generation (5G) sub-6-GHz frequency bands n77 and n78.

Original languageEnglish (US)
Article number9442349
Pages (from-to)3706-3714
Number of pages9
JournalIEEE Transactions on Microwave Theory and Techniques
Volume69
Issue number8
DOIs
StatePublished - Aug 2021
Externally publishedYes

Keywords

  • Acoustic resonators
  • fifth generation (5G)
  • lithium niobate on insulator (LNOI)
  • low-temperature coefficient of frequency (TCF)
  • microelectromechanical systems (MEMS)
  • new radio (NR)
  • piezoelectricity

ASJC Scopus subject areas

  • Radiation
  • Condensed Matter Physics
  • Electrical and Electronic Engineering

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