Near-surface compositional modifications of ternary alloys during sputtering at elevated temperatures

A. M. Yacout, Nghi Q. Lam, J. F. Stubbins

Research output: Contribution to journalArticle

Abstract

The complex interplay of several physical processes in producing changes in the surface and subsurface compositions of ternary alloys during high-temperature ion bombardment has been theoretically investigated, using a phenomenological model that includes Gibbsian adsorption, preferential sputtering, displacement mixing, radiation-enhanced diffusion, and radiation-induced segregation. Sample calculations were performed for an Fe-Cr-Ni solid solution, representative of an austenitic stainless steel, under 3 keV Ne+ sputtering. The effects of the diverse phenomena involved were examined in details as a function of time and temperature. The present model calculations provide useful information about ion-beam modifications, which is important in the areas of sputter depth-profiling of multicomponent materials and elevated-temperature ion implantation.

Original languageEnglish (US)
Pages (from-to)49-60
Number of pages12
JournalNuclear Inst. and Methods in Physics Research, B
Volume42
Issue number1
DOIs
StatePublished - May 1989

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Instrumentation

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