TY - JOUR
T1 - Near-surface compositional modifications of ternary alloys during sputtering at elevated temperatures
AU - Yacout, A. M.
AU - Lam, Nghi Q.
AU - Stubbins, J. F.
PY - 1989/5
Y1 - 1989/5
N2 - The complex interplay of several physical processes in producing changes in the surface and subsurface compositions of ternary alloys during high-temperature ion bombardment has been theoretically investigated, using a phenomenological model that includes Gibbsian adsorption, preferential sputtering, displacement mixing, radiation-enhanced diffusion, and radiation-induced segregation. Sample calculations were performed for an Fe-Cr-Ni solid solution, representative of an austenitic stainless steel, under 3 keV Ne+ sputtering. The effects of the diverse phenomena involved were examined in details as a function of time and temperature. The present model calculations provide useful information about ion-beam modifications, which is important in the areas of sputter depth-profiling of multicomponent materials and elevated-temperature ion implantation.
AB - The complex interplay of several physical processes in producing changes in the surface and subsurface compositions of ternary alloys during high-temperature ion bombardment has been theoretically investigated, using a phenomenological model that includes Gibbsian adsorption, preferential sputtering, displacement mixing, radiation-enhanced diffusion, and radiation-induced segregation. Sample calculations were performed for an Fe-Cr-Ni solid solution, representative of an austenitic stainless steel, under 3 keV Ne+ sputtering. The effects of the diverse phenomena involved were examined in details as a function of time and temperature. The present model calculations provide useful information about ion-beam modifications, which is important in the areas of sputter depth-profiling of multicomponent materials and elevated-temperature ion implantation.
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U2 - 10.1016/0168-583X(89)90010-4
DO - 10.1016/0168-583X(89)90010-4
M3 - Article
AN - SCOPUS:0024656328
VL - 42
SP - 49
EP - 60
JO - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
JF - Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
SN - 0168-583X
IS - 1
ER -