Near sputter-threshold GaSb nanopatterning

Osman El-Atwani, Sean Gonderman, Jean Paul Allain

Research output: Contribution to journalArticle

Abstract

Nanopatterning at sputter-threshold energies with Ar irradiation of GaSb (100) surfaces is presented. Comparison with high-energy irradiations up to 1000 eV is conducted measuring in-situ the composition evolution over irradiation time at early stages (e.g., <1017 cm-2) and up to nanostructure saturation (e.g., ∼1018 cm-2). Low-energy irradiation is conducted for energies between 15-100 eV and a low-aspect ratio nanostructured dot formation is found. Furthermore, the role of oxide on GaSb is found to delay nanostructure formation and this is predominant at energies below 100 eV. In-situ quartz crystal microbalance measurements collect sputtered particles yielding the sputter rate at threshold energies indicating a correlation between erosion and surface composition consistent with recent theoretical models. Ion-induced segregation is also found and indicated by both compositional measurements of both the surface and the sputtered plume.

Original languageEnglish (US)
Article number104308
JournalJournal of Applied Physics
Volume114
Issue number10
DOIs
StatePublished - Sep 14 2013
Externally publishedYes

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energy
irradiation
thresholds
low aspect ratio
quartz crystals
microbalances
erosion
plumes
saturation
oxides
ions

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Near sputter-threshold GaSb nanopatterning. / El-Atwani, Osman; Gonderman, Sean; Paul Allain, Jean.

In: Journal of Applied Physics, Vol. 114, No. 10, 104308, 14.09.2013.

Research output: Contribution to journalArticle

El-Atwani, O, Gonderman, S & Paul Allain, J 2013, 'Near sputter-threshold GaSb nanopatterning' Journal of Applied Physics, vol 114, no. 10, 104308. DOI: 10.1063/1.4820261
El-Atwani O, Gonderman S, Paul Allain J. Near sputter-threshold GaSb nanopatterning. Journal of Applied Physics. 2013 Sep 14;114(10). 104308. Available from, DOI: 10.1063/1.4820261

El-Atwani, Osman; Gonderman, Sean; Paul Allain, Jean / Near sputter-threshold GaSb nanopatterning.

In: Journal of Applied Physics, Vol. 114, No. 10, 104308, 14.09.2013.

Research output: Contribution to journalArticle

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