Near-field scanning optical tomography: A nondestructive method for three-dimensional nanoscale imaging

Jin Sun, P. Scott Carney, John C. Schotland

Research output: Contribution to journalArticlepeer-review

Abstract

We present the theoretical foundation for near-field scanning optical tomography, a method for three-dimensional optical imaging with subwavelength resolution. An analysis of the forward problem for both scalar and vector optical fields is described. This is followed by the construction of the pseudoinverse solution to the linearized inverse scattering problem. The results are illustrated by numerical simulations.

Original languageEnglish (US)
Pages (from-to)1072-1082
Number of pages11
JournalIEEE Journal on Selected Topics in Quantum Electronics
Volume12
Issue number6
DOIs
StatePublished - Nov 2006

Keywords

  • Imaging
  • Inverse problems
  • Inverse scattering
  • Microscopy
  • Near-field optics
  • Scanning probe microscopy
  • Tomography

ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electrical and Electronic Engineering

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