Near-field scanning optical tomography: A nondestructive method for three-dimensional nanoscale imaging

Jin Sun; P. Scott Carney; John C. Schotland

doi:10.1109/JSTQE.2006.879567

Near-field scanning optical tomography: A nondestructive method for three-dimensional nanoscale imaging

Jin Sun, P. Scott Carney, John C. Schotland

Electrical and Computer Engineering

Research output: Contribution to journal › Article › peer-review

Abstract

We present the theoretical foundation for near-field scanning optical tomography, a method for three-dimensional optical imaging with subwavelength resolution. An analysis of the forward problem for both scalar and vector optical fields is described. This is followed by the construction of the pseudoinverse solution to the linearized inverse scattering problem. The results are illustrated by numerical simulations.

Original language	English (US)
Pages (from-to)	1072-1082
Number of pages	11
Journal	IEEE Journal on Selected Topics in Quantum Electronics
Volume	12
Issue number	6
DOIs	https://doi.org/10.1109/JSTQE.2006.879567
State	Published - Nov 2006

Keywords

Imaging
Inverse problems
Inverse scattering
Microscopy
Near-field optics
Scanning probe microscopy
Tomography

ASJC Scopus subject areas

Atomic and Molecular Physics, and Optics
Electrical and Electronic Engineering

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title = "Near-field scanning optical tomography: A nondestructive method for three-dimensional nanoscale imaging",

abstract = "We present the theoretical foundation for near-field scanning optical tomography, a method for three-dimensional optical imaging with subwavelength resolution. An analysis of the forward problem for both scalar and vector optical fields is described. This is followed by the construction of the pseudoinverse solution to the linearized inverse scattering problem. The results are illustrated by numerical simulations.",

keywords = "Imaging, Inverse problems, Inverse scattering, Microscopy, Near-field optics, Scanning probe microscopy, Tomography",

author = "Jin Sun and Carney, {P. Scott} and Schotland, {John C.}",

note = "Funding Information: Manuscript received December 12, 2005; revised June 5, 2006. The work of P. S. Carney was supported in part U.S. Air Force MURI Grant F49620-03-1-0379 and in part by the National Science Foundation under CAREER Award Grant 0239265. The work of J. C. Schotland was supported in part by the Co-ordinated Science Laboratory and in part by the National Science Foundation under Grant DMR 0425780.",

year = "2006",

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doi = "10.1109/JSTQE.2006.879567",

language = "English (US)",

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T2 - A nondestructive method for three-dimensional nanoscale imaging

AU - Sun, Jin

AU - Carney, P. Scott

AU - Schotland, John C.

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KW - Inverse problems

KW - Inverse scattering

KW - Microscopy

KW - Near-field optics

KW - Scanning probe microscopy

KW - Tomography

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