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NbAl
3
/Al microlaminated thin films deposited by UV laser ablation
H. L. Chung
, M. H. Jilavi
, T. P. Duffey
, M. A. Shannon
,
W. M. Kriven
, J. Mazumder
Materials Science and Engineering
Mechanical Science and Engineering
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3
/Al microlaminated thin films deposited by UV laser ablation'. Together they form a unique fingerprint.
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Keyphrases
Ambient Pressure
25%
Amorphous Structure
25%
Back Pressure
25%
Crystal Growth
25%
Crystallinity
25%
Crystallite Size
25%
Deposition Methods
25%
Electron Beam Scanning
25%
Electron Dispersive Spectroscopy
25%
Electron Microscopy Transmission
25%
Gas Flow
25%
Helium
25%
Helium Gas
25%
Interdiffusion
50%
KrF Excimer Laser
25%
Laser Ablation Deposition
25%
Layer Thickness
25%
Liquid Nitrogen
25%
Microstructure
25%
Multilayer Thin Films
25%
NbAl3
100%
Nitrogen Flow
25%
Pressure Condition
25%
Scanning Electron Microscopy
25%
Scanning Transmission Electron Microscopy
50%
Si Substrate
25%
Spectroscopic Analysis
25%
Transmission Electron Microscopy
50%
UV Laser Ablation
100%
Engineering
Ambient Pressure
50%
Backpressure
50%
Crystal Size
50%
Crystallinity
50%
Deposition Method
50%
Energy dispersive spectrometry
50%
Excimer Laser
50%
Gas Flow
50%
Interdiffusion
100%
Layer Thickness
50%
Si Substrate
50%
Thin Films
100%
Material Science
Aluminum
25%
Amorphous Material
25%
Crystal Growth
25%
Energy-Dispersive X-Ray Spectroscopy
25%
Film
100%
Gas Flow
25%
Laser Ablation
100%
Scanning Electron Microscopy
25%
Scanning Transmission Electron Microscopy
50%
Thin Films
100%
Transmission Electron Microscopy
50%
Medicine and Dentistry
Energy-Dispersive Spectroscopy
50%