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Nanotwinned metal MEMS films with unprecedented strength and stability
Gi Dong Sim
,
Jessica A. Krogstad
, K. Madhav Reddy
, Kelvin Y. Xie
, Gianna M. Valentino
, Timothy P. Weihs
, Kevin J. Hemker
Materials Science and Engineering
Materials Research Laboratory
Research output
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›
peer-review
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Keyphrases
Micro-electro-mechanical Systems
100%
Nanotwinned Metals
100%
Nanotwins
50%
Electrical Properties
25%
Mechanical Stability
25%
Silicon-based
25%
Fabrication Methods
25%
High Density
25%
Device Fabrication
25%
Mechanical Behavior
25%
Linear Elastic
25%
High Strength
25%
Sputter Deposition
25%
Tensile Strength
25%
System Application
25%
Solid Solution Strengthening
25%
High Thermal Stability
25%
Direct Current
25%
Interconnected Networks
25%
Wafer Level
25%
Microelectromechanical Sensors
25%
Density Property
25%
Mechanical Tensile
25%
Behavior Strength
25%
Internet of Things
25%
Tungsten Film
25%
Nickel-molybdenum
25%
Metallic Nickel
25%
Textured Film
25%
Fully Dense
25%
Consumer-centric
25%
Material Science
Microelectromechanical System
100%
Film
100%
Density
20%
Silicon
20%
Mechanical Stability
20%
Electrical Property
20%
Device Fabrication
20%
Molybdenum
20%
Tungsten
20%
Mechanical Property
20%
Ultimate Tensile Strength
20%
Sputter Deposition
20%
Solid Solutions
20%
Microelectromechanical System Sensor
20%