TY - GEN
T1 - Nanotopography imaging using a heated microcantilever in tapping mode
AU - Park, K.
AU - Lee, J.
AU - Zhang, Z. M.
AU - King, W. P.
PY - 2007
Y1 - 2007
N2 - This paper describes tapping mode atomic force microscopy (AFM) using a heated AFM cantilever. Electrical and thermal characterization of the cantilever reveals that the cantilever is in thermal steady state in resonance oscillation, because its thermal time constant, around 300 μs, is much slower than the oscillation frequency of 70.36 kHz. Topographical imaging was performed on silicon calibration gratings of height 20 and 100 nm. The obtained topography sensitivity is as high as 200 μV/nm and the resolution is as good as 0.5 nm/Hz1/2. As in conventional AFM, the tapping mode operation demonstrated here can suppress imaging artifacts and enable imaging of soft samples.
AB - This paper describes tapping mode atomic force microscopy (AFM) using a heated AFM cantilever. Electrical and thermal characterization of the cantilever reveals that the cantilever is in thermal steady state in resonance oscillation, because its thermal time constant, around 300 μs, is much slower than the oscillation frequency of 70.36 kHz. Topographical imaging was performed on silicon calibration gratings of height 20 and 100 nm. The obtained topography sensitivity is as high as 200 μV/nm and the resolution is as good as 0.5 nm/Hz1/2. As in conventional AFM, the tapping mode operation demonstrated here can suppress imaging artifacts and enable imaging of soft samples.
KW - Atomic force microscopy
KW - Heated microcantilever
KW - Topography
UR - http://www.scopus.com/inward/record.url?scp=50049129091&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=50049129091&partnerID=8YFLogxK
U2 - 10.1109/SENSOR.2007.4300439
DO - 10.1109/SENSOR.2007.4300439
M3 - Conference contribution
AN - SCOPUS:50049129091
SN - 1424408423
SN - 9781424408429
T3 - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
SP - 1541
EP - 1544
BT - TRANSDUCERS and EUROSENSORS '07 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems
T2 - 4th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS and EUROSENSORS '07
Y2 - 10 June 2007 through 14 June 2007
ER -