Nanoscale three dimensional pattern formation in light emitting porous silicon

Ik Su Chun, Edmond K. Chow, Xiuling Li

Research output: Contribution to journalArticlepeer-review

Abstract

A simple and efficient method for generating light emitting three-dimensional (3D) nanoscale pattern in silicon is presented. The method is based on differential chemical etching on and in-between patterned metal features. Effective transfer of various two-dimensional nanoscale (10-100 nm) metal patterns on bulk silicon to 3D porous silicon network is demonstrated. The capability and limitations of this method are discussed.

Original languageEnglish (US)
Article number191113
JournalApplied Physics Letters
Volume92
Issue number19
DOIs
StatePublished - 2008

ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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