Nanoscale simulation of heat conduction in semiconductor devices

Sanjiv Sinha, P. K. Schelling, S. R. Phillpot, K. E. Goodson

Research output: Contribution to conferencePaperpeer-review

Abstract

Localized heat generation, with dimensions of the order of 10 nm, takes place in the drain regions of current transistors, resulting in an increase in thermal resistance near such a hotspot. We present a model based on the phonon Boltzmann transport equation (BTE) that agrees well with data for hotspots in simple geometries. The model suggests that scattering rates of optical phonons are key to the conduction physics. We use molecular dynamics to obtain phonon relaxation rates and show their dependence on the energy density in the hotspot. This work improves the constitutive modeling of heat flow in nanoscale devices.

Original languageEnglish (US)
Pages734-735
Number of pages2
StatePublished - Sep 20 2004
Externally publishedYes
EventITherm 2004 - Ninth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems - Las Vegas, NV, United States
Duration: Jun 1 2004Jun 4 2004

Other

OtherITherm 2004 - Ninth Intersociety Conference on Thermal and Thermomechanical Phenomena in Electronic Systems
Country/TerritoryUnited States
CityLas Vegas, NV
Period6/1/046/4/04

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Electrical and Electronic Engineering
  • Materials Chemistry

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