Abstract
Methods for fabricating nanoscale array structures suitable for surface enhanced Raman scattering, structures thus obtained, and methods to characterize the nanoscale array structures suitable for surface enhanced Raman scattering. Nanoscale array structures may comprise nanotrees, nanorecesses and tapered nanopillars.
Original language | English (US) |
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U.S. patent number | 9080981 |
Filing date | 6/11/14 |
State | Published - Jul 14 2015 |