Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding

Osman El-Atwani, Sean Gonderman, Alexander Demasi, Anastassiya Suslova, Justin Fowler, Mohamad El-Atwani, Karl Ludwig, Jean Paul Allain

Research output: Research - peer-reviewArticle

Abstract

We investigated the effect of silicide formation on ion-induced nanopatterning of silicon with various ultrathin metal coatings. Silicon substrates coated with 10 nm Ni, Fe, and Cu were irradiated with 200 eV argon ions at normal incidence. Real time grazing incidence small angle x-ray scattering (GISAXS) and x-ray fluorescence (XRF) were performed during the irradiation process and real time measurements revealed threshold conditions for nanopatterning of silicon at normal incidence irradiation. Three main stages of the nanopatterning process were identified. The real time GISAXS intensity of the correlated peaks in conjunction with XRF revealed that the nanostructures remain for a time period after the removal of the all the metal atoms from the sample depending on the binding energy of the metal silicides formed. Ex-situ XPS confirmed the removal of all metal impurities. In-situ XPS during the irradiation of Ni, Fe, and Cu coated silicon substrates at normal incidence demonstrated phase separation and the formation of different silicide phases that occur upon metal-silicon mixing. Silicide formation leads to nanostructure formation due the preferential erosion of the non-silicide regions and the weakening of the ion induced mass redistribution.

LanguageEnglish (US)
Article number124305
JournalJournal of Applied Physics
Volume113
Issue number12
DOIs
StatePublished - Mar 28 2013
Externally publishedYes

Fingerprint

ion beams
irradiation
silicon
metals
x rays
incidence
ions
x ray fluorescence
x ray scattering
grazing incidence
metal coatings
silicides
erosion
binding energy
time measurement
argon
impurities
thresholds
atoms

ASJC Scopus subject areas

  • Physics and Astronomy(all)

Cite this

Nanopatterning of metal-coated silicon surfaces via ion beam irradiation : Real time x-ray studies reveal the effect of silicide bonding. / El-Atwani, Osman; Gonderman, Sean; Demasi, Alexander; Suslova, Anastassiya; Fowler, Justin; El-Atwani, Mohamad; Ludwig, Karl; Paul Allain, Jean.

In: Journal of Applied Physics, Vol. 113, No. 12, 124305, 28.03.2013.

Research output: Research - peer-reviewArticle

El-Atwani O, Gonderman S, Demasi A, Suslova A, Fowler J, El-Atwani M et al. Nanopatterning of metal-coated silicon surfaces via ion beam irradiation: Real time x-ray studies reveal the effect of silicide bonding. Journal of Applied Physics. 2013 Mar 28;113(12). 124305. Available from, DOI: 10.1063/1.4797480
El-Atwani, Osman ; Gonderman, Sean ; Demasi, Alexander ; Suslova, Anastassiya ; Fowler, Justin ; El-Atwani, Mohamad ; Ludwig, Karl ; Paul Allain, Jean. / Nanopatterning of metal-coated silicon surfaces via ion beam irradiation : Real time x-ray studies reveal the effect of silicide bonding. In: Journal of Applied Physics. 2013 ; Vol. 113, No. 12.
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