Abstract
There is a significant need for chemical identification and chemical imaging of nanofabricated structures and devices, especially for multiple materials integrated at the nanometer scale. Here we present nanofabrication, chemical identification, and nanometer-scale chemical imaging of polymer nanostructures with better than 100 nm spatial resolution. Polymer nanostructures of polyethylene, polystyrene, and poly(3-dodecylthiophene-2,5- diyl) were fabricated by tip-based nanofabrication. Nanometer-scale infrared measurements using atomic force microscopy infrared spectroscopy (AFM-IR) obtained quantitative chemical spectra of these nanostructures. We show chemical imaging of intersecting patterns of nanometer-scale polymer lines of different chemical compositions. The results indicate that for closely packed heterogeneous nanostructures, the spatial resolution of AFM-IR is not limited by nanometer-scale thermal diffusion, but is instead limited by the cantilever sensitivity and the signal-to-noise ratio of the AFM-IR system.
Original language | English (US) |
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Pages (from-to) | 8015-8021 |
Number of pages | 7 |
Journal | ACS Nano |
Volume | 6 |
Issue number | 9 |
DOIs | |
State | Published - Sep 25 2012 |
Keywords
- AFM
- AFM-IR
- TBN
- atomic force microscope
- nanolithography
- photothermal induced resonance
- tDPN
- thermal dip-pen nanolithography
- tip based nanofabrication
ASJC Scopus subject areas
- General Materials Science
- General Engineering
- General Physics and Astronomy