@article{43c579f9a04d49ecb816bf48046c1e0f,
title = "Nanometer-period gratings in hydrogen silsesquioxane fabricated by electron beam lithography",
author = "Word, \{Michael J.\} and Ilesanmi Adesida and Berger, \{Paul R.\}",
year = "2003",
doi = "10.1116/1.1629711",
language = "English (US)",
volume = "21",
pages = "L12--L15",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "6",
}