Nanometer-period gratings in hydrogen silsesquioxane fabricated by electron beam lithography

Michael J. Word; Ilesanmi Adesida; Paul R. Berger

doi:10.1116/1.1629711

Nanometer-period gratings in hydrogen silsesquioxane fabricated by electron beam lithography

Michael J. Word, Ilesanmi Adesida, Paul R. Berger

Research output: Contribution to journal › Article › peer-review

Original language	English (US)
Pages (from-to)	L12-L15
Journal	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume	21
Issue number	6
DOIs	https://doi.org/10.1116/1.1629711
State	Published - 2003
Externally published	Yes

ASJC Scopus subject areas

Condensed Matter Physics
Electrical and Electronic Engineering

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10.1116/1.1629711

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AU - Adesida, Ilesanmi

AU - Berger, Paul R.

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JO - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

IS - 6

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Nanometer-period gratings in hydrogen silsesquioxane fabricated by electron beam lithography

ASJC Scopus subject areas

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