Abstract
Methods and apparatus for characterizing a sample in situ as to both its mechanical and optical characteristics. The apparatus comprises a reflective microscope with a concave primary mirror and a convex secondary mirror sharing a common optical axis, and an actuator vignetted by the convex secondary mirror for applying a force to a nanoprobe in a direction having a component along the common optical axis. The apparatus may addition include a source for generating an illuminating beam, a detector, and a processor for forming an image based on a signal provided by the detector.
Original language | English (US) |
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U.S. patent number | 9588327 |
Filing date | 11/10/14 |
State | Published - Mar 7 2017 |