Abstract

We present a technique to fabricate nano wires on silicon substrates without any lithography. The wires are 50 nm or less in width, but their lengths can be 10s of micro meters. They can be formed by a single or multiple layers of metals. The wires can be designed to form a network which can be partially released from the substrate to form 3D structures. Such structures may serve as actuators or sensors.

Original languageEnglish (US)
Pages45-47
Number of pages3
StatePublished - Jul 23 2003
EventIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems - Kyoto, Japan
Duration: Jan 19 2003Jan 23 2003

Other

OtherIEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems
CountryJapan
CityKyoto
Period1/19/031/23/03

    Fingerprint

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Saif, T., Alaca, E., & Sehitoglu, H. (2003). Nano wires by self assembly. 45-47. Paper presented at IEEE Sixteenth Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Japan.