Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements

Zhenting Dai; Elise A. Corbin; William Paul King

doi:10.1109/MEMSYS.2010.5442467

Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements

Zhenting Dai, Elise A. Corbin, William Paul King

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports the design, fabrication, and testing of a multilayer cantilever structure having a doped silicon heater-thermometer separated from the silicon cantilever legs by a thermally insulating silicon nitride layer. The multilayer microcantilever can be heated above 600 °C. Highly sensitive thermal topography measurements were successfully demonstrated on a 20 nm tall silicon grating. The thermal topography results agree well with the conventional laser deflection measurements. We achieved a thermal topography reading sensitivity of 1.3x10^-4 nm^-1 and a thermal topography resolution of 6.9 pm/√Hz. This compares well to published data on other types of cantilevers.

Original language	English (US)
Title of host publication	MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest
Pages	460-463
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2010.5442467
State	Published - 2010
Event	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 - Hong Kong, China Duration: Jan 24 2010 → Jan 28 2010

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010
Country/Territory	China
City	Hong Kong
Period	1/24/10 → 1/28/10

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/MEMSYS.2010.5442467

Library availability

Discover UIUC Full Text

Cite this

Dai, Z., Corbin, E. A., & King, W. P. (2010). Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest (pp. 460-463). Article 5442467 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2010.5442467

Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements. / Dai, Zhenting; Corbin, Elise A.; King, William Paul.
MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 460-463 5442467 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Dai, Z, Corbin, EA & King, WP 2010, Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements. in MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest., 5442467, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 460-463, 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010, Hong Kong, China, 1/24/10. https://doi.org/10.1109/MEMSYS.2010.5442467

Dai Z, Corbin EA, King WP. Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements. In MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. p. 460-463. 5442467. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2010.5442467

Dai, Zhenting ; Corbin, Elise A. ; King, William Paul. / Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements. MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest. 2010. pp. 460-463 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{50e67903854c423da6933d2a86907377,

title = "Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements",

abstract = "This paper reports the design, fabrication, and testing of a multilayer cantilever structure having a doped silicon heater-thermometer separated from the silicon cantilever legs by a thermally insulating silicon nitride layer. The multilayer microcantilever can be heated above 600 °C. Highly sensitive thermal topography measurements were successfully demonstrated on a 20 nm tall silicon grating. The thermal topography results agree well with the conventional laser deflection measurements. We achieved a thermal topography reading sensitivity of 1.3x10-4 nm-1 and a thermal topography resolution of 6.9 pm/√Hz. This compares well to published data on other types of cantilevers.",

author = "Zhenting Dai and Corbin, {Elise A.} and King, {William Paul}",

year = "2010",

doi = "10.1109/MEMSYS.2010.5442467",

language = "English (US)",

isbn = "9781424457649",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "460--463",

booktitle = "MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest",

note = "23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010 ; Conference date: 24-01-2010 Through 28-01-2010",

}

TY - GEN

T1 - Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements

AU - Dai, Zhenting

AU - Corbin, Elise A.

AU - King, William Paul

PY - 2010

Y1 - 2010

N2 - This paper reports the design, fabrication, and testing of a multilayer cantilever structure having a doped silicon heater-thermometer separated from the silicon cantilever legs by a thermally insulating silicon nitride layer. The multilayer microcantilever can be heated above 600 °C. Highly sensitive thermal topography measurements were successfully demonstrated on a 20 nm tall silicon grating. The thermal topography results agree well with the conventional laser deflection measurements. We achieved a thermal topography reading sensitivity of 1.3x10-4 nm-1 and a thermal topography resolution of 6.9 pm/√Hz. This compares well to published data on other types of cantilevers.

AB - This paper reports the design, fabrication, and testing of a multilayer cantilever structure having a doped silicon heater-thermometer separated from the silicon cantilever legs by a thermally insulating silicon nitride layer. The multilayer microcantilever can be heated above 600 °C. Highly sensitive thermal topography measurements were successfully demonstrated on a 20 nm tall silicon grating. The thermal topography results agree well with the conventional laser deflection measurements. We achieved a thermal topography reading sensitivity of 1.3x10-4 nm-1 and a thermal topography resolution of 6.9 pm/√Hz. This compares well to published data on other types of cantilevers.

UR - http://www.scopus.com/inward/record.url?scp=77952764129&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=77952764129&partnerID=8YFLogxK

U2 - 10.1109/MEMSYS.2010.5442467

DO - 10.1109/MEMSYS.2010.5442467

M3 - Conference contribution

AN - SCOPUS:77952764129

SN - 9781424457649

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 460

EP - 463

BT - MEMS 2010 - The 23rd IEEE International Conference on Micro Electro Mechanical Systems, Technical Digest

T2 - 23rd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2010

Y2 - 24 January 2010 through 28 January 2010

ER -

Multilayer microcantilever heater-thermometer with improved thermal resistance for nanotopography measurements

Abstract

Publication series

Other

ASJC Scopus subject areas

Online availability

Library availability

Related links

Fingerprint

Cite this