Multifunctional atomic force microscope cantilever with lorentz force actuation and self-heating for nanomechanical measurements in air and water

S. Somnath, J. O. Liu, M. Bakir, C. B. Prater, W. P. King

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports a multifunctional cantilever capable of self-heating and Lorentz force actuation for nanomechanical measurements over a large temperature range. The novel electrical design of the cantilever allows for high current to flow through the cantilever, resulting in high Lorentz force. The cantilever can self-heat beyond 800 °C, and the heating is mostly independent of actuation force. When operated at its resonance frequency of 102 kHz, the cantilever generates more than 5.3 µN of Lorentz force while self-heating only to 44 °C. This cantilever can generate about 7X larger Lorentz force than other heated cantilevers. The cantilever can be operated in air or water.

Original languageEnglish (US)
Title of host publication2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
EditorsMark G. Allen, Mehran Mehregany
PublisherTransducer Research Foundation
Pages307-310
Number of pages4
ISBN (Electronic)9781940470016
DOIs
StatePublished - 2014
Event2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014 - Hilton Head Island, United States
Duration: Jun 8 2014Jun 12 2014

Publication series

NameTechnical Digest - Solid-State Sensors, Actuators, and Microsystems Workshop

Conference

Conference2014 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2014
Country/TerritoryUnited States
CityHilton Head Island
Period6/8/146/12/14

ASJC Scopus subject areas

  • Control and Systems Engineering
  • Electrical and Electronic Engineering
  • Hardware and Architecture

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