Multichannel microchemical reactor comprising replica-molded microplasma devices: Chemiluminescence and sulfur deposition in Ar/CS2 flows

Tyler S. Anderson, Jeffrey H. Ma, Sung Jin Park, J. Gary Eden

Research output: Contribution to journalArticle

Abstract

Microchemical reactors consisting of parallel linear arrays of interconnected cylindrical microcavity plasma devices have been fabricated by replica molding in ultraviolet-curable polymer. Tests of 10 × 10 arrays of 400-μm-diameter devices with 125-μm-wide gas flow channels have been conducted in rare gas and Ar/CS2 flows and excitation of the array with a sinusoidal voltage. Visible chemiluminescence (λ ∼ 505 nm) resulting from the à → X̃ transition of CS2+ and the deposition of a n (C-S)n microstructured polymer have been observed in the Ar/CS2 flow experiments.

Original languageEnglish (US)
Pages (from-to)1250-1251
Number of pages2
JournalIEEE Transactions on Plasma Science
Volume36
Issue number4 PART 1
DOIs
StatePublished - Aug 1 2008

Keywords

  • Argon
  • Chemiluminescence
  • Fluid flow
  • Inductors
  • Microcavities
  • Microchannels
  • Microchemical reactor
  • Microplasmas
  • Plasma devices
  • Polymers
  • Soft lithography

ASJC Scopus subject areas

  • Nuclear and High Energy Physics
  • Condensed Matter Physics

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