Abstract
A matrix-implicit multi-level Newton method for black-box self-consistent analysis of 3-D microelectromechanical systems (MEMS) is described. The approach is shown to converge very rapidly and is much faster than relaxation algorithm for tightly coupled problems. In addition, the matrix-implicit approach is used to derive a computationally efficient technique to extract the fundamental frequency as a function of applied voltage for a microstructure. While this paper focusses on coupled electromechanical analysis, the proposed algorithm can be extended to include several coupled domains encountered in MEMS.
| Original language | English (US) |
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| Title of host publication | International Conference on Simulation of Semiconductor Processes and Devices, SISPAD |
| Editors | Anon |
| Publisher | IEEE |
| Pages | 125-128 |
| Number of pages | 4 |
| State | Published - 1997 |
| Externally published | Yes |
| Event | Proceedings of the 1997 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD'97 - Cambridge, MA, USA Duration: Sep 8 1997 → Sep 10 1997 |
Other
| Other | Proceedings of the 1997 International Conference on Simulation of Semiconductor Processes and Devices, SISPAD'97 |
|---|---|
| City | Cambridge, MA, USA |
| Period | 9/8/97 → 9/10/97 |
ASJC Scopus subject areas
- General Engineering