Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators

Songbin Gong, Ginaluca Piazza

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

This paper reports on the first implementation of monolithically integrated wideband RF filters using Lithium Niobate (LN) based high electromechanical coupling (kt2) MEMS resonators. MEMS-based RF filters operating at 500 and 750 MHz have been demonstrated on the same chip and shown a fractional bandwidth (FBW) of 2% and 3.9%, respectively - the highest demonstrated to date by laterally vibrating resonators (LVRs). The insertions loss (IL) of the 750 MHz filters is as low as 4 dB. The demonstration of these wideband filters is made possible by the design and fabrication of a two-port LN resonator topology that has lithographically defined center frequencies and exhibits kt2 as high as 10% and Q of 500 in air.

Original languageEnglish (US)
Title of host publicationIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages785-788
Number of pages4
DOIs
StatePublished - Apr 2 2013
Externally publishedYes
EventIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China
Duration: Jan 20 2013Jan 24 2013

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999

Other

OtherIEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
CountryTaiwan, Province of China
CityTaipei
Period1/20/131/24/13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

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