Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators

Songbin Gong; Ginaluca Piazza

doi:10.1109/MEMSYS.2013.6474360

Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper reports on the first implementation of monolithically integrated wideband RF filters using Lithium Niobate (LN) based high electromechanical coupling (k_t²) MEMS resonators. MEMS-based RF filters operating at 500 and 750 MHz have been demonstrated on the same chip and shown a fractional bandwidth (FBW) of 2% and 3.9%, respectively - the highest demonstrated to date by laterally vibrating resonators (LVRs). The insertions loss (IL) of the 750 MHz filters is as low as 4 dB. The demonstration of these wideband filters is made possible by the design and fabrication of a two-port LN resonator topology that has lithographically defined center frequencies and exhibits k_t² as high as 10% and Q of 500 in air.

Original language	English (US)
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	785-788
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474360
State	Published - 2013
Externally published	Yes
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: Jan 20 2013 → Jan 24 2013

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Other

Other	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan, Province of China
City	Taipei
Period	1/20/13 → 1/24/13

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Online availability

10.1109/MEMSYS.2013.6474360

Library availability

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Cite this

Gong, S., & Piazza, G. (2013). Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 785-788). Article 6474360 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474360

Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators. / Gong, Songbin; Piazza, Ginaluca.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 785-788 6474360 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Gong, S & Piazza, G 2013, Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474360, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 785-788, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 1/20/13. https://doi.org/10.1109/MEMSYS.2013.6474360

Gong S, Piazza G. Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 785-788. 6474360. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2013.6474360

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abstract = "This paper reports on the first implementation of monolithically integrated wideband RF filters using Lithium Niobate (LN) based high electromechanical coupling (kt2) MEMS resonators. MEMS-based RF filters operating at 500 and 750 MHz have been demonstrated on the same chip and shown a fractional bandwidth (FBW) of 2% and 3.9%, respectively - the highest demonstrated to date by laterally vibrating resonators (LVRs). The insertions loss (IL) of the 750 MHz filters is as low as 4 dB. The demonstration of these wideband filters is made possible by the design and fabrication of a two-port LN resonator topology that has lithographically defined center frequencies and exhibits kt2 as high as 10% and Q of 500 in air.",

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Multi-frequency wideband RF filters using high electromechanical coupling laterally vibrating lithium niobate MEMS resonators

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