Morphological instabilities in thin-film growth and etching

Research output: Contribution to journalArticlepeer-review

Abstract

Morphological instabilities in thin-film growth and etching were studied. Pattern formation of the morphology results when a mechanism that destabilizes the morphology on long length scales competes with mechanism that stabilizes the morphology on short length scales. The comments on some of the unresolved scientific issues were presented.

Original languageEnglish (US)
JournalJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume21
Issue number5
DOIs
StatePublished - Sep 1 2003

ASJC Scopus subject areas

  • Condensed Matter Physics
  • Surfaces and Interfaces
  • Surfaces, Coatings and Films

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