Abstract
Morphological instabilities in thin-film growth and etching were studied. Pattern formation of the morphology results when a mechanism that destabilizes the morphology on long length scales competes with mechanism that stabilizes the morphology on short length scales. The comments on some of the unresolved scientific issues were presented.
| Original language | English (US) |
|---|---|
| Pages (from-to) | S110-S116 |
| Journal | Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films |
| Volume | 21 |
| Issue number | 5 |
| DOIs | |
| State | Published - Sep 2003 |
ASJC Scopus subject areas
- Condensed Matter Physics
- Surfaces and Interfaces
- Surfaces, Coatings and Films