TY - JOUR
T1 - MONTE CARLO SIMULATION OF ION BEAM PENETRATION IN SOLIDS.
AU - ADESIDA, ILESANMI
AU - KARAPIPERIS, LEONIDAS
PY - 1982
Y1 - 1982
N2 - THE ESSENTIAL FEATURES OF A MONTE CARLO PROGRAM WHICH SIMULATES THE SCATTERING AND THE RETARDATION OF ENERGETIC IONS INAMORPHOUS TARGETS ARE PRESENTED. THE NEW EXPERIMENTALLY DERIVED UNIVERSAL SCATTERING CROSS-SECTION OF KALBITZER AND OETZMANN IS USED TO DESCRIBE NUCLEAR SCATTERING EVENTS. FOR ELECTRONIC ENERGY LOSS, THE LINDHARD-SCHARFF AND BETHE FORMULAEARE USED. THE PROGRAM WAS PRIMARILY DEVELOPED TO STUDY THE SPATIAL DISTRIBUTION OF ION DEPOSITED ENERGY FOR LITHOGRAPHIC APPLICATIONS. HOWEVER, FOR INITIAL VERIFICATION, THE PROGRAM HAS BEEN USED TO STUDY THE FUNDAMENTAL CHARACTERISTICS OFION TRANSPORT FOR VARIOUS ION-TARGET COMBINATIONS. THE THEORETICAL PREDICTIONS OBTAINED USING THE ABOVE EXPRESSIONS FORNUCLEAR SCATTERING AND ELECTRONIC ENERGY LOSS ARE SHOWN TO AGREE VERY WELL WITH EXPERIMENTAL RESULTS.
AB - THE ESSENTIAL FEATURES OF A MONTE CARLO PROGRAM WHICH SIMULATES THE SCATTERING AND THE RETARDATION OF ENERGETIC IONS INAMORPHOUS TARGETS ARE PRESENTED. THE NEW EXPERIMENTALLY DERIVED UNIVERSAL SCATTERING CROSS-SECTION OF KALBITZER AND OETZMANN IS USED TO DESCRIBE NUCLEAR SCATTERING EVENTS. FOR ELECTRONIC ENERGY LOSS, THE LINDHARD-SCHARFF AND BETHE FORMULAEARE USED. THE PROGRAM WAS PRIMARILY DEVELOPED TO STUDY THE SPATIAL DISTRIBUTION OF ION DEPOSITED ENERGY FOR LITHOGRAPHIC APPLICATIONS. HOWEVER, FOR INITIAL VERIFICATION, THE PROGRAM HAS BEEN USED TO STUDY THE FUNDAMENTAL CHARACTERISTICS OFION TRANSPORT FOR VARIOUS ION-TARGET COMBINATIONS. THE THEORETICAL PREDICTIONS OBTAINED USING THE ABOVE EXPRESSIONS FORNUCLEAR SCATTERING AND ELECTRONIC ENERGY LOSS ARE SHOWN TO AGREE VERY WELL WITH EXPERIMENTAL RESULTS.
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U2 - 10.1080/00337578208229936
DO - 10.1080/00337578208229936
M3 - Article
AN - SCOPUS:0020269059
VL - V 61
SP - 223
EP - 233
JO - Radiation Effects and Defects in Solids
JF - Radiation Effects and Defects in Solids
SN - 1042-0150
IS - N 3-4
ER -