MONTE CARLO SIMULATION OF ION BEAM PENETRATION IN SOLIDS.

ILESANMI ADESIDA; LEONIDAS KARAPIPERIS

doi:10.1080/00337578208229936

MONTE CARLO SIMULATION OF ION BEAM PENETRATION IN SOLIDS.

ILESANMI ADESIDA, LEONIDAS KARAPIPERIS

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Abstract

THE ESSENTIAL FEATURES OF A MONTE CARLO PROGRAM WHICH SIMULATES THE SCATTERING AND THE RETARDATION OF ENERGETIC IONS INAMORPHOUS TARGETS ARE PRESENTED. THE NEW EXPERIMENTALLY DERIVED UNIVERSAL SCATTERING CROSS-SECTION OF KALBITZER AND OETZMANN IS USED TO DESCRIBE NUCLEAR SCATTERING EVENTS. FOR ELECTRONIC ENERGY LOSS, THE LINDHARD-SCHARFF AND BETHE FORMULAEARE USED. THE PROGRAM WAS PRIMARILY DEVELOPED TO STUDY THE SPATIAL DISTRIBUTION OF ION DEPOSITED ENERGY FOR LITHOGRAPHIC APPLICATIONS. HOWEVER, FOR INITIAL VERIFICATION, THE PROGRAM HAS BEEN USED TO STUDY THE FUNDAMENTAL CHARACTERISTICS OFION TRANSPORT FOR VARIOUS ION-TARGET COMBINATIONS. THE THEORETICAL PREDICTIONS OBTAINED USING THE ABOVE EXPRESSIONS FORNUCLEAR SCATTERING AND ELECTRONIC ENERGY LOSS ARE SHOWN TO AGREE VERY WELL WITH EXPERIMENTAL RESULTS.

Original language	English (US)
Pages (from-to)	223-233
Number of pages	11
Journal	RADIAT EFF
Volume	V 61
Issue number	N 3-4
DOIs	https://doi.org/10.1080/00337578208229936
State	Published - 1982

ASJC Scopus subject areas

Engineering(all)

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@article{3c293e887bec41a58e5345eab0c1bbb7,

title = "MONTE CARLO SIMULATION OF ION BEAM PENETRATION IN SOLIDS.",

abstract = "THE ESSENTIAL FEATURES OF A MONTE CARLO PROGRAM WHICH SIMULATES THE SCATTERING AND THE RETARDATION OF ENERGETIC IONS INAMORPHOUS TARGETS ARE PRESENTED. THE NEW EXPERIMENTALLY DERIVED UNIVERSAL SCATTERING CROSS-SECTION OF KALBITZER AND OETZMANN IS USED TO DESCRIBE NUCLEAR SCATTERING EVENTS. FOR ELECTRONIC ENERGY LOSS, THE LINDHARD-SCHARFF AND BETHE FORMULAEARE USED. THE PROGRAM WAS PRIMARILY DEVELOPED TO STUDY THE SPATIAL DISTRIBUTION OF ION DEPOSITED ENERGY FOR LITHOGRAPHIC APPLICATIONS. HOWEVER, FOR INITIAL VERIFICATION, THE PROGRAM HAS BEEN USED TO STUDY THE FUNDAMENTAL CHARACTERISTICS OFION TRANSPORT FOR VARIOUS ION-TARGET COMBINATIONS. THE THEORETICAL PREDICTIONS OBTAINED USING THE ABOVE EXPRESSIONS FORNUCLEAR SCATTERING AND ELECTRONIC ENERGY LOSS ARE SHOWN TO AGREE VERY WELL WITH EXPERIMENTAL RESULTS.",

author = "ILESANMI ADESIDA and LEONIDAS KARAPIPERIS",

year = "1982",

doi = "10.1080/00337578208229936",

language = "English (US)",

volume = "V 61",

pages = "223--233",

journal = "Radiation Effects and Defects in Solids",

issn = "1042-0150",

publisher = "Taylor and Francis Ltd.",

number = "N 3-4",

}

TY - JOUR

T1 - MONTE CARLO SIMULATION OF ION BEAM PENETRATION IN SOLIDS.

AU - ADESIDA, ILESANMI

AU - KARAPIPERIS, LEONIDAS

PY - 1982

Y1 - 1982

N2 - THE ESSENTIAL FEATURES OF A MONTE CARLO PROGRAM WHICH SIMULATES THE SCATTERING AND THE RETARDATION OF ENERGETIC IONS INAMORPHOUS TARGETS ARE PRESENTED. THE NEW EXPERIMENTALLY DERIVED UNIVERSAL SCATTERING CROSS-SECTION OF KALBITZER AND OETZMANN IS USED TO DESCRIBE NUCLEAR SCATTERING EVENTS. FOR ELECTRONIC ENERGY LOSS, THE LINDHARD-SCHARFF AND BETHE FORMULAEARE USED. THE PROGRAM WAS PRIMARILY DEVELOPED TO STUDY THE SPATIAL DISTRIBUTION OF ION DEPOSITED ENERGY FOR LITHOGRAPHIC APPLICATIONS. HOWEVER, FOR INITIAL VERIFICATION, THE PROGRAM HAS BEEN USED TO STUDY THE FUNDAMENTAL CHARACTERISTICS OFION TRANSPORT FOR VARIOUS ION-TARGET COMBINATIONS. THE THEORETICAL PREDICTIONS OBTAINED USING THE ABOVE EXPRESSIONS FORNUCLEAR SCATTERING AND ELECTRONIC ENERGY LOSS ARE SHOWN TO AGREE VERY WELL WITH EXPERIMENTAL RESULTS.

AB - THE ESSENTIAL FEATURES OF A MONTE CARLO PROGRAM WHICH SIMULATES THE SCATTERING AND THE RETARDATION OF ENERGETIC IONS INAMORPHOUS TARGETS ARE PRESENTED. THE NEW EXPERIMENTALLY DERIVED UNIVERSAL SCATTERING CROSS-SECTION OF KALBITZER AND OETZMANN IS USED TO DESCRIBE NUCLEAR SCATTERING EVENTS. FOR ELECTRONIC ENERGY LOSS, THE LINDHARD-SCHARFF AND BETHE FORMULAEARE USED. THE PROGRAM WAS PRIMARILY DEVELOPED TO STUDY THE SPATIAL DISTRIBUTION OF ION DEPOSITED ENERGY FOR LITHOGRAPHIC APPLICATIONS. HOWEVER, FOR INITIAL VERIFICATION, THE PROGRAM HAS BEEN USED TO STUDY THE FUNDAMENTAL CHARACTERISTICS OFION TRANSPORT FOR VARIOUS ION-TARGET COMBINATIONS. THE THEORETICAL PREDICTIONS OBTAINED USING THE ABOVE EXPRESSIONS FORNUCLEAR SCATTERING AND ELECTRONIC ENERGY LOSS ARE SHOWN TO AGREE VERY WELL WITH EXPERIMENTAL RESULTS.

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