Abstract
Vertical cavity surface emitting lasers (VCSEL) have been used for a wide range of microsystem applications which benefit from monolithic integration with compatible photodetectors. Integrated resonate cavity photodetectors (RCPD) with selectively oxidized VCSELs have been fabricated by etching away a portion of the top distributed Bragg reflector mirror of nominally 850 nm lasers. Integrated VCSEL/RCPD were characterized by measuring the photoresponse of a RCPD under illumination of the reflected emission of a neighboring VCSEL.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 27-28 |
| Number of pages | 2 |
| Journal | Conference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS |
| Volume | 2 |
| State | Published - 1998 |
| Externally published | Yes |
| Event | Proceedings of the 1998 11th Annual Meeting IEEE Lasers and Electro-Optics Society, LEOS. Part 2 (of 2) - Orlando, FL, USA Duration: Dec 1 1998 → Dec 4 1998 |
ASJC Scopus subject areas
- Electronic, Optical and Magnetic Materials
- Electrical and Electronic Engineering
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