Monolithically integrated VCSELs and photodetectors for microsystem applications

K. M. Geib, K. D. Choquette, A. Allerman, J. J. Hindi, J. Nevers, B. E. Hammons

Research output: Contribution to journalConference article


Vertical cavity surface emitting lasers (VCSEL) have been used for a wide range of microsystem applications which benefit from monolithic integration with compatible photodetectors. Integrated resonate cavity photodetectors (RCPD) with selectively oxidized VCSELs have been fabricated by etching away a portion of the top distributed Bragg reflector mirror of nominally 850 nm lasers. Integrated VCSEL/RCPD were characterized by measuring the photoresponse of a RCPD under illumination of the reflected emission of a neighboring VCSEL.

Original languageEnglish (US)
Pages (from-to)27-28
Number of pages2
JournalConference Proceedings - Lasers and Electro-Optics Society Annual Meeting-LEOS
StatePublished - Dec 1 1998
Externally publishedYes
EventProceedings of the 1998 11th Annual Meeting IEEE Lasers and Electro-Optics Society, LEOS. Part 2 (of 2) - Orlando, FL, USA
Duration: Dec 1 1998Dec 4 1998

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Electrical and Electronic Engineering

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