Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Xin Yu; Ehsan Arbabi; Lynford L. Goddard; Xiuling Li; Xiaogang Chen

doi:10.1063/1.4927243

Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Xin Yu, Ehsan Arbabi, Lynford L. Goddard, Xiuling Li, Xiaogang Chen

Research output: Contribution to journal › Article › peer-review

Abstract

We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. The highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.

Original language	English (US)
Article number	031102
Journal	Applied Physics Letters
Volume	107
Issue number	3
DOIs	https://doi.org/10.1063/1.4927243
State	Published - Jul 20 2015

ASJC Scopus subject areas

Physics and Astronomy (miscellaneous)

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10.1063/1.4927243

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@article{9f9ad1b4198b4fe0bedc0854feb2599d,

title = "Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration",

abstract = "We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. The highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.",

author = "Xin Yu and Ehsan Arbabi and Goddard, {Lynford L.} and Xiuling Li and Xiaogang Chen",

note = "Publisher Copyright: {\textcopyright} 2015 AIP Publishing LLC.",

year = "2015",

month = jul,

day = "20",

doi = "10.1063/1.4927243",

language = "English (US)",

volume = "107",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "3",

}

TY - JOUR

T1 - Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

AU - Yu, Xin

AU - Arbabi, Ehsan

AU - Goddard, Lynford L.

AU - Li, Xiuling

AU - Chen, Xiaogang

PY - 2015/7/20

Y1 - 2015/7/20

N2 - We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. The highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.

AB - We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. The highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.

UR - http://www.scopus.com/inward/record.url?scp=84937501034&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84937501034&partnerID=8YFLogxK

U2 - 10.1063/1.4927243

DO - 10.1063/1.4927243

M3 - Article

AN - SCOPUS:84937501034

SN - 0003-6951

VL - 107

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 3

M1 - 031102

ER -

Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

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