Monolithically integrated self-rolled-up microtube-based vertical coupler for three-dimensional photonic integration

Xin Yu, Ehsan Arbabi, Lynford L. Goddard, Xiuling Li, Xiaogang Chen

Research output: Contribution to journalArticle


We demonstrate a self-rolled-up microtube-based vertical photonic coupler monolithically integrated on top of a ridge waveguide to achieve three-dimensional (3D) photonic integration. The fabrication process is fully compatible with standard planar silicon processing technology. Strong light coupling between the vertical coupler and the ridge waveguide was observed experimentally, which may provide an alternative route for 3D heterogeneous photonic integration. The highest extinction ratio observed in the transmission spectrum passing through the ridge waveguide was 23 dB.

Original languageEnglish (US)
Article number031102
JournalApplied Physics Letters
Issue number3
StatePublished - Jul 20 2015


ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

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