Monolithic radio frequency SiN _x self-rolled-up nanomembrane interdigital capacitor modeling and fabrication

Keyphrases

• Capacitors 100%
• Radio Frequency 100%
• Nanomembrane 100%
• Self-rolled-up 100%
• SiNx 100%
• Capacitor Model 100%
• Capacitance Density 100%
• Interdigital Capacitor 100%
• Rolled-up 66%
• High Capacitance 66%
• 3D Structure 33%
• Fabrication Methods 33%
• Capacitance 33%
• Miniaturization 33%
• Integrated Circuits 33%
• Resonant Frequency 33%
• Simple Solution 33%
• Design Principles 33%
• Semiconductor Processing 33%
• Wireless Communication 33%
• Minimal Change 33%
• Operating Frequency 33%
• Electrical Design 33%
• Structure Building 33%
• Area Footprint 33%
• Interdigital Electrodes 33%
• Three-dimensional Coil 33%

Engineering

• Radio Frequency 100%
• Integrated Circuit 33%
• Dimensional Structure 33%
• Fabrication Method 33%
• Resonant Frequency 33%
• Operating Frequency 33%
• Wireless Communication 33%
• Effective Configuration 33%
• Frequency Capacitor 33%

Material Science

• Capacitor 100%
• Capacitance 100%
• Density 75%
• Electronic Circuit 25%
• Design Principle 25%