Monolithic multi-frequency wideband RF filters using two-port laterally vibrating lithium niobate MEMS resonators

Songbin Gong, Gianluca Piazza

Research output: Contribution to journalArticlepeer-review


This paper reports on monolithically integrated multifrequency wideband radio frequency (RF) filters based on two-port laterally vibrating lithium niobate microelectromechanical (MEMS) resonators (LVRs). Two-port MEMS resonators based on transferred lithium niobate thin film are designed and experimentally demonstrated. Self-coupled RF filters are implemented by cascading two identical two-port resonators. Modified Mason's models are used to predict the resonators and filters performance. A good agreement is attained between theory and experimental results. The fabricated two-port devices with center frequencies at 500 and 750 MHz exhibit electromechanical coupling coefficients (kt2) of 8% and 14.6%, respectively. As a result, the self-coupled RF filters formed by these resonators are capable of low loss (4 dB) and wideband filtering. Fractional bandwidth of 2% and 3.9% have been achieved-the highest reported for MEMS LVRs. This paper shows that RF-MEMS filters based on LVRs can achieve sufficient bandwidth to cover most of the existing commercial standards.

Original languageEnglish (US)
Article number6775244
Pages (from-to)1188-1197
Number of pages10
JournalJournal of Microelectromechanical Systems
Issue number5
StatePublished - Oct 1 2014


  • Lithium niobate
  • high electromechanical coupling
  • lamb wave
  • laterally vibrating resonators
  • piezoelectric
  • quality factor.
  • wide-band RF filters

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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