Monolithic multi-frequency wideband RF filters using two-port laterally vibrating lithium niobate MEMS resonators

Songbin Gong, Gianluca Piazza

Research output: Contribution to journalArticle

Abstract

This paper reports on monolithically integrated multifrequency wideband radio frequency (RF) filters based on two-port laterally vibrating lithium niobate microelectromechanical (MEMS) resonators (LVRs). Two-port MEMS resonators based on transferred lithium niobate thin film are designed and experimentally demonstrated. Self-coupled RF filters are implemented by cascading two identical two-port resonators. Modified Mason's models are used to predict the resonators and filters performance. A good agreement is attained between theory and experimental results. The fabricated two-port devices with center frequencies at 500 and 750 MHz exhibit electromechanical coupling coefficients (kt2) of 8% and 14.6%, respectively. As a result, the self-coupled RF filters formed by these resonators are capable of low loss (4 dB) and wideband filtering. Fractional bandwidth of 2% and 3.9% have been achieved-the highest reported for MEMS LVRs. This paper shows that RF-MEMS filters based on LVRs can achieve sufficient bandwidth to cover most of the existing commercial standards.

Original languageEnglish (US)
Article number6775244
Pages (from-to)1188-1197
Number of pages10
JournalJournal of Microelectromechanical Systems
Volume23
Issue number5
DOIs
StatePublished - Oct 1 2014

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MEMS
Resonators
Lithium
Bandwidth
Electromechanical coupling
Thin films

Keywords

  • Lithium niobate
  • high electromechanical coupling
  • lamb wave
  • laterally vibrating resonators
  • piezoelectric
  • quality factor.
  • wide-band RF filters

ASJC Scopus subject areas

  • Mechanical Engineering
  • Electrical and Electronic Engineering

Cite this

Monolithic multi-frequency wideband RF filters using two-port laterally vibrating lithium niobate MEMS resonators. / Gong, Songbin; Piazza, Gianluca.

In: Journal of Microelectromechanical Systems, Vol. 23, No. 5, 6775244, 01.10.2014, p. 1188-1197.

Research output: Contribution to journalArticle

@article{f38d73f5233a42b2926cbe442d3473a7,
title = "Monolithic multi-frequency wideband RF filters using two-port laterally vibrating lithium niobate MEMS resonators",
abstract = "This paper reports on monolithically integrated multifrequency wideband radio frequency (RF) filters based on two-port laterally vibrating lithium niobate microelectromechanical (MEMS) resonators (LVRs). Two-port MEMS resonators based on transferred lithium niobate thin film are designed and experimentally demonstrated. Self-coupled RF filters are implemented by cascading two identical two-port resonators. Modified Mason's models are used to predict the resonators and filters performance. A good agreement is attained between theory and experimental results. The fabricated two-port devices with center frequencies at 500 and 750 MHz exhibit electromechanical coupling coefficients (kt2) of 8{\%} and 14.6{\%}, respectively. As a result, the self-coupled RF filters formed by these resonators are capable of low loss (4 dB) and wideband filtering. Fractional bandwidth of 2{\%} and 3.9{\%} have been achieved-the highest reported for MEMS LVRs. This paper shows that RF-MEMS filters based on LVRs can achieve sufficient bandwidth to cover most of the existing commercial standards.",
keywords = "Lithium niobate, high electromechanical coupling, lamb wave, laterally vibrating resonators, piezoelectric, quality factor., wide-band RF filters",
author = "Songbin Gong and Gianluca Piazza",
year = "2014",
month = "10",
day = "1",
doi = "10.1109/JMEMS.2014.2308259",
language = "English (US)",
volume = "23",
pages = "1188--1197",
journal = "Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
number = "5",

}

TY - JOUR

T1 - Monolithic multi-frequency wideband RF filters using two-port laterally vibrating lithium niobate MEMS resonators

AU - Gong, Songbin

AU - Piazza, Gianluca

PY - 2014/10/1

Y1 - 2014/10/1

N2 - This paper reports on monolithically integrated multifrequency wideband radio frequency (RF) filters based on two-port laterally vibrating lithium niobate microelectromechanical (MEMS) resonators (LVRs). Two-port MEMS resonators based on transferred lithium niobate thin film are designed and experimentally demonstrated. Self-coupled RF filters are implemented by cascading two identical two-port resonators. Modified Mason's models are used to predict the resonators and filters performance. A good agreement is attained between theory and experimental results. The fabricated two-port devices with center frequencies at 500 and 750 MHz exhibit electromechanical coupling coefficients (kt2) of 8% and 14.6%, respectively. As a result, the self-coupled RF filters formed by these resonators are capable of low loss (4 dB) and wideband filtering. Fractional bandwidth of 2% and 3.9% have been achieved-the highest reported for MEMS LVRs. This paper shows that RF-MEMS filters based on LVRs can achieve sufficient bandwidth to cover most of the existing commercial standards.

AB - This paper reports on monolithically integrated multifrequency wideband radio frequency (RF) filters based on two-port laterally vibrating lithium niobate microelectromechanical (MEMS) resonators (LVRs). Two-port MEMS resonators based on transferred lithium niobate thin film are designed and experimentally demonstrated. Self-coupled RF filters are implemented by cascading two identical two-port resonators. Modified Mason's models are used to predict the resonators and filters performance. A good agreement is attained between theory and experimental results. The fabricated two-port devices with center frequencies at 500 and 750 MHz exhibit electromechanical coupling coefficients (kt2) of 8% and 14.6%, respectively. As a result, the self-coupled RF filters formed by these resonators are capable of low loss (4 dB) and wideband filtering. Fractional bandwidth of 2% and 3.9% have been achieved-the highest reported for MEMS LVRs. This paper shows that RF-MEMS filters based on LVRs can achieve sufficient bandwidth to cover most of the existing commercial standards.

KW - Lithium niobate

KW - high electromechanical coupling

KW - lamb wave

KW - laterally vibrating resonators

KW - piezoelectric

KW - quality factor.

KW - wide-band RF filters

UR - http://www.scopus.com/inward/record.url?scp=84907931894&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=84907931894&partnerID=8YFLogxK

U2 - 10.1109/JMEMS.2014.2308259

DO - 10.1109/JMEMS.2014.2308259

M3 - Article

AN - SCOPUS:84907931894

VL - 23

SP - 1188

EP - 1197

JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

SN - 1057-7157

IS - 5

M1 - 6775244

ER -