Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

Wen Huang; Zhendong Yang; Mark D. Kraman; Qingyi Wang; Zihao Ou; Miguel Muñoz Rojo; Ananth Saran Yalamarthy; Victoria Chen; Feifei Lian; Jimmy H. Ni; Siyu Liu; Haotian Yu; Lei Sang; Julian Michaels; Dane J. Sievers; J. Gary Eden; Paul V. Braun; Qian Chen; Songbin Gong; Debbie G. Senesky; Eric Pop; Xiuling Li

doi:10.1126/sciadv.aay4508

Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

Wen Huang, Zhendong Yang, Mark D. Kraman, Qingyi Wang, Zihao Ou, Miguel Muñoz Rojo, Ananth Saran Yalamarthy, Victoria Chen, Feifei Lian, Jimmy H. Ni, Siyu Liu, Haotian Yu, Lei Sang, Julian Michaels, Dane J. Sievers, J. Gary Eden, Paul V. Braun, Qian Chen, Songbin Gong, Debbie G. SeneskyEric Pop, Xiuling Li

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Abstract

Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 μH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 μH/mm² and 23 μH/mm³, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.

Original language	English (US)
Article number	eaay4508
Journal	Science Advances
Volume	6
Issue number	3
DOIs	https://doi.org/10.1126/sciadv.aay4508
State	Published - Jan 17 2020

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Huang, W., Yang, Z., Kraman, M. D., Wang, Q., Ou, Z., Rojo, M. M., Yalamarthy, A. S., Chen, V., Lian, F., Ni, J. H., Liu, S., Yu, H., Sang, L., Michaels, J., Sievers, D. J., Gary Eden, J., Braun, P. V., Chen, Q., Gong, S., ... Li, X. (2020). Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology. Science Advances, 6(3), Article eaay4508. https://doi.org/10.1126/sciadv.aay4508

Huang, W, Yang, Z, Kraman, MD, Wang, Q, Ou, Z, Rojo, MM, Yalamarthy, AS, Chen, V, Lian, F, Ni, JH, Liu, S, Yu, H, Sang, L, Michaels, J, Sievers, DJ, Gary Eden, J , Braun, PV , Chen, Q , Gong, S, Senesky, DG, Pop, E & Li, X 2020, 'Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology', Science Advances, vol. 6, no. 3, eaay4508. https://doi.org/10.1126/sciadv.aay4508

@article{e7e817115a9b4bb4a4d9927e4fe8ce76,

title = "Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology",

abstract = "Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 μH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 μH/mm2 and 23 μH/mm3, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.",

author = "Wen Huang and Zhendong Yang and Kraman, {Mark D.} and Qingyi Wang and Zihao Ou and Rojo, {Miguel Mu{\~n}oz} and Yalamarthy, {Ananth Saran} and Victoria Chen and Feifei Lian and Ni, {Jimmy H.} and Siyu Liu and Haotian Yu and Lei Sang and Julian Michaels and Sievers, {Dane J.} and {Gary Eden}, J. and Braun, {Paul V.} and Qian Chen and Songbin Gong and Senesky, {Debbie G.} and Eric Pop and Xiuling Li",

note = "Funding Information: This work was supported, in part, by the National Science Foundation Engineering Research Center for Power Optimization of Electro-Thermal Systems (POETS) under Awards EEC no. 1449548 (W.H., Z.Y., J.M., X.L., P.V.B., E.P., and D.S.) and IIP no. 17-01047 (M.D.K., Q.W., and X.L.); the U.S. Department of Energy (DOE), Office of Science, Basic Energy Sciences (BES) under award no. DEFG02-07ER46471 (W.H., S.L., X.L., P.V.B., and Q.C.); and the National Natural Science Foundation of China under award no. 61974038 (W.H.).",

year = "2020",

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doi = "10.1126/sciadv.aay4508",

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T1 - Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

AU - Huang, Wen

AU - Yang, Zhendong

AU - Kraman, Mark D.

AU - Wang, Qingyi

AU - Ou, Zihao

AU - Rojo, Miguel Muñoz

AU - Yalamarthy, Ananth Saran

AU - Chen, Victoria

AU - Lian, Feifei

AU - Ni, Jimmy H.

AU - Liu, Siyu

AU - Yu, Haotian

AU - Sang, Lei

AU - Michaels, Julian

AU - Sievers, Dane J.

AU - Gary Eden, J.

AU - Braun, Paul V.

AU - Chen, Qian

AU - Gong, Songbin

AU - Senesky, Debbie G.

AU - Pop, Eric

AU - Li, Xiuling

N1 - Funding Information: This work was supported, in part, by the National Science Foundation Engineering Research Center for Power Optimization of Electro-Thermal Systems (POETS) under Awards EEC no. 1449548 (W.H., Z.Y., J.M., X.L., P.V.B., E.P., and D.S.) and IIP no. 17-01047 (M.D.K., Q.W., and X.L.); the U.S. Department of Energy (DOE), Office of Science, Basic Energy Sciences (BES) under award no. DEFG02-07ER46471 (W.H., S.L., X.L., P.V.B., and Q.C.); and the National Natural Science Foundation of China under award no. 61974038 (W.H.).

PY - 2020/1/17

Y1 - 2020/1/17

N2 - Monolithic strong magnetic induction at the mtesla to tesla level provides essential functionalities to physical, chemical, and medical systems. Current design options are constrained by existing capabilities in three-dimensional (3D) structure construction, current handling, and magnetic material integration. We report here geometric transformation of large-area and relatively thick (~100 to 250 nm) 2D nanomembranes into multiturn 3D air-core microtubes by a vapor-phase self-rolled-up membrane (S-RuM) nanotechnology, combined with postrolling integration of ferrofluid magnetic materials by capillary force. Hundreds of S-RuM power inductors on sapphire are designed and tested, with maximum operating frequency exceeding 500 MHz. An inductance of 1.24 μH at 10 kHz has been achieved for a single microtube inductor, with corresponding areal and volumetric inductance densities of 3 μH/mm2 and 23 μH/mm3, respectively. The simulated intensity of the magnetic induction reaches tens of mtesla in fabricated devices at 10 MHz.

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ER -

Monolithic mtesla-level magnetic induction by self-rolled-up membrane technology

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