Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling

Xin Yu, Lynford L. Goddard, Xiuling Li, Xiaogang Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Multi-channel vertical photonic coupling was observed, by integrating two different SiNx vertical microring couplers (VμRC) monolithically on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRC's.

Original languageEnglish (US)
Title of host publication2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
ISBN (Electronic)9781943580279
StatePublished - Oct 25 2017
Event2017 Conference on Lasers and Electro-Optics, CLEO 2017 - San Jose, United States
Duration: May 14 2017May 19 2017

Publication series

Name2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
Volume2017-January

Other

Other2017 Conference on Lasers and Electro-Optics, CLEO 2017
CountryUnited States
CitySan Jose
Period5/14/175/19/17

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ASJC Scopus subject areas

  • Atomic and Molecular Physics, and Optics
  • Electronic, Optical and Magnetic Materials
  • Instrumentation

Cite this

Yu, X., Goddard, L. L., Li, X., & Chen, X. (2017). Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling. In 2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings (pp. 1-2). (2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings; Vol. 2017-January). Institute of Electrical and Electronics Engineers Inc..