Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling

Xin Yu, Lynford L Goddard, Xiuling Li, Xiaogang Chen

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Multi-channel vertical photonic coupling was observed, by integrating two different SiNx vertical microring couplers (VμRC) monolithically on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRC's.

Original languageEnglish (US)
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2017
PublisherOSA - The Optical Society
ISBN (Print)9781943580279
DOIs
StatePublished - Jan 1 2017
EventCLEO: Science and Innovations, CLEO_SI 2017 - San Jose, United States
Duration: May 14 2017May 19 2017

Publication series

NameOptics InfoBase Conference Papers
VolumePart F41-CLEO_SI 2017

Other

OtherCLEO: Science and Innovations, CLEO_SI 2017
CountryUnited States
CitySan Jose
Period5/14/175/19/17

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ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials

Cite this

Yu, X., Goddard, L. L., Li, X., & Chen, X. (2017). Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling. In CLEO: Science and Innovations, CLEO_SI 2017 (Optics InfoBase Conference Papers; Vol. Part F41-CLEO_SI 2017). OSA - The Optical Society. https://doi.org/10.1364/CLEO_SI.2017.SF1H.8