Monolithic integration of vertical SiNx microrings on a ridge waveguide to achieve multi-channel photonic coupling

Xin Yu; Lynford L. Goddard; Xiuling Li; Xiaogang Chen

doi:10.1364/CLEO_SI.2017.SF1H.8

Monolithic integration of vertical SiN_x microrings on a ridge waveguide to achieve multi-channel photonic coupling

Xin Yu, Lynford L. Goddard, Xiuling Li, Xiaogang Chen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

Multi-channel vertical photonic coupling was observed, by integrating two different SiNx vertical microring couplers (VμRC) monolithically on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRC's.

Original language	English (US)
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO_SI 2017
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580279
DOIs	https://doi.org/10.1364/CLEO_SI.2017.SF1H.8
State	Published - 2017
Event	CLEO: Science and Innovations, CLEO_SI 2017 - San Jose, United States Duration: May 14 2017 → May 19 2017

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F41-CLEO_SI 2017
ISSN (Electronic)	2162-2701

Other

Other	CLEO: Science and Innovations, CLEO_SI 2017
Country/Territory	United States
City	San Jose
Period	5/14/17 → 5/19/17

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Mechanics of Materials

Online availability

10.1364/CLEO_SI.2017.SF1H.8

Library availability

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Cite this

Monolithic integration of vertical SiN_x microrings on a ridge waveguide to achieve multi-channel photonic coupling. / Yu, Xin; Goddard, Lynford L.; Li, Xiuling et al.
CLEO: Science and Innovations, CLEO_SI 2017. Optica Publishing Group (formerly OSA), 2017. (Optics InfoBase Conference Papers; Vol. Part F41-CLEO_SI 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Yu, X, Goddard, LL , Li, X & Chen, X 2017, Monolithic integration of vertical SiN_x microrings on a ridge waveguide to achieve multi-channel photonic coupling. in CLEO: Science and Innovations, CLEO_SI 2017. Optics InfoBase Conference Papers, vol. Part F41-CLEO_SI 2017, Optica Publishing Group (formerly OSA), CLEO: Science and Innovations, CLEO_SI 2017, San Jose, United States, 5/14/17. https://doi.org/10.1364/CLEO_SI.2017.SF1H.8

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abstract = "Multi-channel vertical photonic coupling was observed, by integrating two different SiNx vertical microring couplers (VμRC) monolithically on a single ridge waveguide. This work represents a critical step to 3D photonic integration using VμRC's.",

author = "Xin Yu and Goddard, {Lynford L.} and Xiuling Li and Xiaogang Chen",

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