Modelling the nonlinear dynamics of electrically driven impact microactuators

Xiaopeng Zhao, Harry Dankowicz, Ali H. Nayfeh

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

Accurate positioning in the micro or nano scale is of prime importance in the MEMS industry. Manual manipulation is difficult because of sticking due to surface adhesion forces. Regular microactuators need large actuation forces and a long driving distance. This would require large voltages to produce the desired forces. In contrast, micromachined actuators based on impulsive forces provide a solution to this problem. Impacts are a source of nonlinearity and a careful study of the dynamics is essential in order to ensure a consistent performance of the device. The present study explores the asymptotic dynamics associated with impact microactuators using both numerical integration and local analysis.

Original languageEnglish (US)
Title of host publicationProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
EditorsW. Badawy, W. Moussa
Pages700-705
Number of pages6
StatePublished - Dec 1 2004
Externally publishedYes
EventProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004 - Banff, Alta., Canada
Duration: Aug 25 2004Aug 27 2004

Publication series

NameProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004

Other

OtherProceedings - 2004 International Conference on MEMS, NANO and Smart Systems, ICMENS 2004
Country/TerritoryCanada
CityBanff, Alta.
Period8/25/048/27/04

ASJC Scopus subject areas

  • Engineering(all)

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