Modeling of fatigue in polysilicon MEMS structures

Keyphrases

• Fatigue Experiment 50%
• Fatigue Life Prediction 50%
• Future Modeling 50%
• Life Data 50%
• MEMS Structure 100%
• Modeling Effort 50%
• Multicrystalline Silicon 50%
• Polysilicon 50%
• Polysilicon MEMS 100%
• Regression Analysis 50%
• Silicon MEMS 50%
• Stressful Life Events 50%

Engineering

• Fatigue Life Prediction 50%
• Microelectromechanical System 100%
• Polysilicon 100%
• Silicon Single Crystal 50%

Material Science

• Fatigue of Materials 50%
• Microelectromechanical System 100%
• Silicon 100%
• Single Crystal 50%