Modeling of fatigue in polysilicon MEMS structures

K. Bhalerao, A. B.O. Soboyejo, W. O. Soboyejo

Research output: Contribution to journalArticlepeer-review


This paper presents an empirical approach to the modeling of fatigue in silicon MEMS structures. The approach is based on the regression analysis of stress-life data obtained from prior fatigue experiments on polysilicon and single crystal silicon. The possible directions for future modeling efforts are identified at the end of the paper, following a discussion on the implications of the current model fatigue life prediction.

Original languageEnglish (US)
Pages (from-to)4157-4161
Number of pages5
JournalJournal of Materials Science
Issue number20
StatePublished - Oct 15 2003
Externally publishedYes

ASJC Scopus subject areas

  • Mechanics of Materials
  • Ceramics and Composites
  • Mechanical Engineering
  • Polymers and Plastics
  • General Materials Science
  • Materials Science (miscellaneous)


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