TY - GEN
T1 - Modeling and distributed control of an electrostatically actuated microcantilever array
AU - Sarwar, Azeem
AU - Voulgaris, Petros G.
AU - Salapaka, Srinivasa M.
PY - 2007
Y1 - 2007
N2 - This paper presents a basic model and control design of an array of electrostatically actuated microcantilevers that can be put to use for high throughput applications, such as, multi cantilever imaging applications in Atomic Force Microscopy (AFM). We consider a model of infinite array which belongs to the class of spatially invariant systems, and design a ℋ∞ distributed controller while making use of the information from only the immediate neighbors. The performance of this controller is tested via simulations on a finite nonlinear model of the system. Based on the achieved resolution and bandwidth, the device holds high potential for AFM applications in contact mode such as, indenting, pushing, cutting, and lithography.
AB - This paper presents a basic model and control design of an array of electrostatically actuated microcantilevers that can be put to use for high throughput applications, such as, multi cantilever imaging applications in Atomic Force Microscopy (AFM). We consider a model of infinite array which belongs to the class of spatially invariant systems, and design a ℋ∞ distributed controller while making use of the information from only the immediate neighbors. The performance of this controller is tested via simulations on a finite nonlinear model of the system. Based on the achieved resolution and bandwidth, the device holds high potential for AFM applications in contact mode such as, indenting, pushing, cutting, and lithography.
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U2 - 10.1109/ACC.2007.4283093
DO - 10.1109/ACC.2007.4283093
M3 - Conference contribution
AN - SCOPUS:46449092771
SN - 1424409888
SN - 9781424409884
T3 - Proceedings of the American Control Conference
SP - 4240
EP - 4245
BT - Proceedings of the 2007 American Control Conference, ACC
T2 - 2007 American Control Conference, ACC
Y2 - 9 July 2007 through 13 July 2007
ER -