Modeling and distributed control of an electrostatically actuated microcantilever array

Azeem Sarwar; Petros G. Voulgaris; Srinivasa M. Salapaka

doi:10.1109/ACC.2007.4283093

Modeling and distributed control of an electrostatically actuated microcantilever array

Azeem Sarwar, Petros G. Voulgaris, Srinivasa M. Salapaka

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Abstract

This paper presents a basic model and control design of an array of electrostatically actuated microcantilevers that can be put to use for high throughput applications, such as, multi cantilever imaging applications in Atomic Force Microscopy (AFM). We consider a model of infinite array which belongs to the class of spatially invariant systems, and design a ℋ_∞ distributed controller while making use of the information from only the immediate neighbors. The performance of this controller is tested via simulations on a finite nonlinear model of the system. Based on the achieved resolution and bandwidth, the device holds high potential for AFM applications in contact mode such as, indenting, pushing, cutting, and lithography.

Original language	English (US)
Title of host publication	Proceedings of the 2007 American Control Conference, ACC
Pages	4240-4245
Number of pages	6
DOIs	https://doi.org/10.1109/ACC.2007.4283093
State	Published - 2007
Externally published	Yes
Event	2007 American Control Conference, ACC - New York, NY, United States Duration: Jul 9 2007 → Jul 13 2007

Publication series

Name	Proceedings of the American Control Conference
ISSN (Print)	0743-1619

Other

Other	2007 American Control Conference, ACC
Country/Territory	United States
City	New York, NY
Period	7/9/07 → 7/13/07

ASJC Scopus subject areas

Electrical and Electronic Engineering

Online availability

10.1109/ACC.2007.4283093

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Modeling and distributed control of an electrostatically actuated microcantilever array. / Sarwar, Azeem; Voulgaris, Petros G.; Salapaka, Srinivasa M.

Proceedings of the 2007 American Control Conference, ACC. 2007. p. 4240-4245 4283093 (Proceedings of the American Control Conference).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution

Sarwar, A, Voulgaris, PG & Salapaka, SM 2007, Modeling and distributed control of an electrostatically actuated microcantilever array. in Proceedings of the 2007 American Control Conference, ACC., 4283093, Proceedings of the American Control Conference, pp. 4240-4245, 2007 American Control Conference, ACC, New York, NY, United States, 7/9/07. https://doi.org/10.1109/ACC.2007.4283093

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AB - This paper presents a basic model and control design of an array of electrostatically actuated microcantilevers that can be put to use for high throughput applications, such as, multi cantilever imaging applications in Atomic Force Microscopy (AFM). We consider a model of infinite array which belongs to the class of spatially invariant systems, and design a ℋ∞ distributed controller while making use of the information from only the immediate neighbors. The performance of this controller is tested via simulations on a finite nonlinear model of the system. Based on the achieved resolution and bandwidth, the device holds high potential for AFM applications in contact mode such as, indenting, pushing, cutting, and lithography.

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Modeling and distributed control of an electrostatically actuated microcantilever array

Abstract

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