Modeling and distributed control of an electrostatically actuated microcantilever array

Azeem Sarwar, Petros G. Voulgaris, Srinivasa M. Salapaka

Research output: Chapter in Book/Report/Conference proceedingConference contribution


This paper presents a basic model and control design of an array of electrostatically actuated microcantilevers that can be put to use for high throughput applications, such as, multi cantilever imaging applications in Atomic Force Microscopy (AFM). We consider a model of infinite array which belongs to the class of spatially invariant systems, and design a ℋ distributed controller while making use of the information from only the immediate neighbors. The performance of this controller is tested via simulations on a finite nonlinear model of the system. Based on the achieved resolution and bandwidth, the device holds high potential for AFM applications in contact mode such as, indenting, pushing, cutting, and lithography.

Original languageEnglish (US)
Title of host publicationProceedings of the 2007 American Control Conference, ACC
Number of pages6
StatePublished - 2007
Externally publishedYes
Event2007 American Control Conference, ACC - New York, NY, United States
Duration: Jul 9 2007Jul 13 2007

Publication series

NameProceedings of the American Control Conference
ISSN (Print)0743-1619


Other2007 American Control Conference, ACC
Country/TerritoryUnited States
CityNew York, NY

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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