Abstract
A mass-spring-damper model has been presented to describe the cantilever-sample dynamics in Atomic Force Microscope (AFM). Friction has been incorporated in this model by using Johnson-Kendall-Roberts (JKR) theory for elastic contacts. It has been validated by exhibiting some characteristic features (such as stick-slip behavior) observed in experiments with AFMs. A control law has been designed so that the piezoelectric tube in an AFM moves in a desired manner inspite of the friction. Simulation results have been presented to illustrate the model and performance of the controllers.
| Original language | English (US) |
|---|---|
| Pages (from-to) | 2102-2107 |
| Number of pages | 6 |
| Journal | Proceedings of the American Control Conference |
| Volume | 3 |
| State | Published - 2000 |
| Externally published | Yes |
| Event | 2000 American Control Conference - Chicago, IL, USA Duration: Jun 28 2000 → Jun 30 2000 |
ASJC Scopus subject areas
- Electrical and Electronic Engineering