Model for friction in atomic force microscopy

S. Salapaka, M. Dahleh

Research output: Contribution to journalConference articlepeer-review


A mass-spring-damper model has been presented to describe the cantilever-sample dynamics in Atomic Force Microscope (AFM). Friction has been incorporated in this model by using Johnson-Kendall-Roberts (JKR) theory for elastic contacts. It has been validated by exhibiting some characteristic features (such as stick-slip behavior) observed in experiments with AFMs. A control law has been designed so that the piezoelectric tube in an AFM moves in a desired manner inspite of the friction. Simulation results have been presented to illustrate the model and performance of the controllers.

Original languageEnglish (US)
Pages (from-to)2102-2107
Number of pages6
JournalProceedings of the American Control Conference
StatePublished - Dec 1 2000
Externally publishedYes
Event2000 American Control Conference - Chicago, IL, USA
Duration: Jun 28 2000Jun 30 2000

ASJC Scopus subject areas

  • Electrical and Electronic Engineering


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