A mass-spring-damper model has been presented to describe the cantilever-sample dynamics in Atomic Force Microscope (AFM). Friction has been incorporated in this model by using Johnson-Kendall-Roberts (JKR) theory for elastic contacts. It has been validated by exhibiting some characteristic features (such as stick-slip behavior) observed in experiments with AFMs. A control law has been designed so that the piezoelectric tube in an AFM moves in a desired manner inspite of the friction. Simulation results have been presented to illustrate the model and performance of the controllers.
ASJC Scopus subject areas
- Electrical and Electronic Engineering