Model-based multiple patterning layout decomposition

Daifeng Guo, Haitong Tian, Yuelin Du, Martin D.F. Wong

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Fingerprint

Dive into the research topics of 'Model-based multiple patterning layout decomposition'. Together they form a unique fingerprint.

Keyphrases

Computer Science

Engineering

Material Science