Model based control of dynamic atomic force microscope

Research output: Contribution to journalArticlepeer-review

Abstract

A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments.

Original languageEnglish (US)
Article number043703
JournalReview of Scientific Instruments
Volume86
Issue number4
DOIs
StatePublished - Apr 1 2015

ASJC Scopus subject areas

  • Instrumentation

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