Model based control of dynamic atomic force microscope

Chibum Lee; Srinivasa M. Salapaka

doi:10.1063/1.4917301

Model based control of dynamic atomic force microscope

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Abstract

A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H_∞ control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments.

Original language	English (US)
Article number	043703
Journal	Review of Scientific Instruments
Volume	86
Issue number	4
DOIs	https://doi.org/10.1063/1.4917301
State	Published - Apr 1 2015

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Instrumentation

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abstract = "A model-based robust control approach is proposed that significantly improves imaging bandwidth for the dynamic mode atomic force microscopy. A model for cantilever oscillation amplitude and phase dynamics is derived and used for the control design. In particular, the control design is based on a linearized model and robust H∞ control theory. This design yields a significant improvement when compared to the conventional proportional-integral designs and verified by experiments.",

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Model based control of dynamic atomic force microscope

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