Model and observations of dielectric charge in thermally oxidized silicon resonators

Gaurav Bahl, Renata Melamud, Bongsang Kim, Saurabh A. Chandorkar, James C. Salvia, Matthew A. Hopcroft, David Elata, Robert G. Hennessy, Rob N. Candler, Roger T. Howe, Thomas W. Kenny

Research output: Contribution to journalArticlepeer-review

Fingerprint

Dive into the research topics of 'Model and observations of dielectric charge in thermally oxidized silicon resonators'. Together they form a unique fingerprint.

Engineering & Materials Science